Mycronic Prexision-MMS™ Display mask metrology system.pdf

Se tt in g a ne w s tan dar d f or r egi st ra ti on mea s ur emen t t hr oug h genera t io n 8 My c r o nic Pr e x i s ion - M MS ™ Displa y mask m et ro logy  sy ste m

Setting a new standard for registration

measurement through generation 8

Mycronic Prexision-MMS

™

Display mask

metrologysystem

SETTING A NEW STANDARD FOR

REGISTRATIONMEASUREMENTS

The Prexision-MMS is a registration measurement

system for advanced display photomasks up to

1400x1620 mm sucient for generation 8 masks.

ThePrexision-MMS takes registration measurements to

a new level meeting the requirements of the latest and

coming generation photomasks. The system can also

be used for CD measurements.

INNOVATIVE AND IMPROVED PLATFORM

By adopting our latest innovative platform, Prexision-MMS

ensures superior performance in registration and overlay

measurement. This is enabled by a complete re-design

of the X-carriage and the optical head and a new

Y-movement concept, all controlled with new servos. The

system is enclosed in a climate chamber to eliminate errors

caused by variations in temperature. The stage is made of

Zerodur, a highly temperature stable material, which re-

duces the eects of any remaining temperature variations.

To further improve registration performance the system

is also equipped with dierent new features such as, new

optic head and new electronics togheter with other im-

provements. Theinnovative improvements enables much

more accurate and trustable 1st round measurement result

Mycronic has supported the display technology evolution for more than a decade by supplying state of the art mask

writers and metrology systems. The industry approaching the limitation for enabling next generation displays due to

nonexistence of a metrology system supporting the latest pattern generator generation, the Prexision-80. ThusMycronic

has decided to introduce the next generation metrology system, Prexision-MMS based on the latest version of the

Prexision platform. The system will be a critical component supporting the development of future displays and supports

the trend producing advanced displays in larger generation fabs.

KEY BENEFITS COMPARED TO MMS15000

Superior accuracy

Improved short and long term stability

Faster measurements since no initial thermal drifts

Needed to enable the full registration performance of

thePrexision based mask writers

KEY SPECIFICATIONS

Registration, 0–90–180–270 degrees (3 )

(calibrated area)

65 nm

Overlay mask-to-mask (3

) 40 nm

CD repeatability (3

) 50 nm

CD linearity (range/2) 30 nm

Mycronic Prexision-MMS

For high end display photomask

through generation 8

which enable not only better measurements but also turn-

around time, which simpliﬁes planning at the maskshop.

LARGE FLEXIBILITY AND AUTOMATION POSSIBILITIES

The system is capable of measuring crosses, star shape

but also any general pattern shapes that ﬁt into the

measurement window. It also has scripting capabilities

to allow automated measurements. Theresults can be

displayed graphically in grid graphs. Extensive post

processing and analysis functions are included to assist

in interpreting the measurement results. The measure-

ment data can be exported for use in external software.

IMPROVED REGISTRATION MEASUREMENTS

WITHTWO UNIQUE TECHNIQUES

The system oers two unique techniques enabling

improved registration measurements, which are system

registration calibration and Z-correction. System regis-

tration calibration will deliver the absolute registration

reference. Z-correction ensures outstanding perfor-

mance in placement measurement regardless of mask

ﬂatness and presence of particles or loading stress.

With these two unique techniques in combination with

Prexision-80 will become the industry role model to

create the most advanced masks.

Mycronic, Prexision, LRS, FPS, MMS, Sigma and Omega are registered trademarks or trademarks of Mycronic AB. Mycronic is ISO 9001:2008 certiﬁed.

Mycronic’s Prexision laser pattern generators are protected by several patents including, but not limited to, the following patents:

US Patents No. 5 495 279, US 5 517 349, US 5 635 976, US 6 448 999, US 6 529 266, US 6 624 878, US 6 700 600, US 6 844 123,

US 6 883 158, US 7 148 971, US 7 709 165, US 7 912 671, US 7 919 218, US 8 137 875 and Chinese Patents No. CN 00807832.7, ZL00814427.3,

ZL200480031019.7, CN 101194208, CN 102037312, and other corresponding national patents and patent applications pending.

AB11790 rev 0001 / March 2015

SWEDEN

Mycronic AB

PO Box 3141

Nytorpsvägen 9

SE-183 03 Täby

Sweden

Tel: +46 8 638 52 00

Fax: +46 8 638 52 90

GERMANY

Mycronic GmbH

Tel: +49 89 4524248-0

Fax: +49 89 4524248-80

Mycronic Ltd.

Tel: +44 1202 723 585

Fax: +44 1202 723 269

FRANCE

Mycronic S.A.S.

Tel: +33 1 41 80 15 80

Fax: +33 1 46 86 77 89

NETHERLANDS

Mycronic B.V.

Tel: +31 402 62 06 67

Fax: +31 402 62 06 68

USA

Mycronic Inc.

Tel: +1 978 948 6919

Fax: +1 978 948 6915

SOUTH KOREA

Mycronic Co. Ltd.

Tel: +82 31 387 5111

Fax: +82 31 388 0087

CHINA

Mycronic Co., Ltd.

Tel: +86 21 3252 3785/86

Fax: +86 21 3252 3780

SINGAPORE

Mycronic Pte Ltd.

Tel: +65 6281 7997

Fax: +65 6281 7667

JAPAN

Mycronic Technologies

Corporation

Tel: +81 42 354 1320

Fax: +81 42 354 1321