DECAN_S2_Maintenance(Eng_Ver4.3).pdf - 第57页
W ee kly Inspe ction chapt er 4 Advanced Chip Shooter DE CAN S2 M ain ten an ce H and bo ok 4-4 Checking the Solenod V alve W eekly Inspe ction Measures Step 1. Ins er t th e CN0 40 noz zle into th e AN C. Step 2. Op era…
Weekly Inspection
chapter 4
Advanced Chip Shooter
DECAN S2 Maintenance Handbook
4-3
Cleaning Head Mirror
Tool for Maintenance
Air sprayer, alcohol, ultra-fine fiber cloth
Measures
Step 1.
Move the Front X Frame and Rear X Frame to both
ends by referring to "Forward movement of the front
X-frame" on page 1-3 and "Backward movement of the
rear X-frame" on page 1-7.
Step 2.
Press the 'STOP' and 'RESET' buttons in order after
pressing the 'EMG' button on the OP panel to stop
operation.
For more details, refer to "How to perform emergency stop" on page
1-2.
Step 3.
Remove the dust from the mirror using an air sprayer.
Step 4.
If the foreign material is not removed completely, clean
the mirror using a ultra-fine fiber cloth smeared with
alcohol.
Caution
Cleaning the lens by exerting force may damage the surface of the
lens.
Step 5.
Release the emergency stop as described in "Releasing
'Emergency Stop' mode" on page 1-10 and perform the
operation again.
Cleaning Head Mirror
(Time required: 5min / No. W-2)
Weekly Inspection
chapter 4
Advanced Chip Shooter
DECAN S2 Maintenance Handbook
4-4
Checking the Solenod Valve
Weekly Inspection
Measures
Step 1.
Insert the CN040 nozzle into the ANC.
Step 2.
Operate the machine to install the CN040 nozzle of the
ANC on the head.
Step 3.
Select the 'Diagnosis' menu of the MMI and select the
'Vacuum' submenu.
2
1
Checking the Solenod Valve
(Time required: 20min / No. W-3)
Weekly Inspection
chapter 4
Advanced Chip Shooter
DECAN S2 Maintenance Handbook
4-5
Checking the Solenod Valve
Step 4.
Click the <Valve Check> button and select the Vacuum
ON/OFF count in the <Try> combo box of the 'Valve
Check' dialog box and then click the <Test> button.
3
5
4
Step 5.
If the check result shows that the solenoid valve has a
problem, contact our STS or local agent to replace the
corresponding solenoid valve.
For further details related to the solenoid valve check or for any
problems, refer to '14.4 Vacuum' of the Administrator's Guide.
Caution
Check the vacuum filter every week and replace it within at least 6
months to ensure the vacuum for part pickup is generated properly.
It is recommended that the solenoid valve, which is a consumable
product, is replaced every two years to ensure stable operation.