晶圆测试说明书Cascade-11861-6-Manual.pdf - 第103页
Glossary • 79 Glossary Chapter 1 Air Dryer An air dryer is a device that reduces th e relative humidity of the MicroChamber purge air to a dew point of -70 ° C (-94 ° F). AttoGuard The AttoGuard extends the instrumen t…
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• Summit 11K/12K Probe Station User’s Guide
Glossary •
79
Glossary Chapter 1
Air Dryer An air dryer is a device that reduces the relative humidity of the MicroChamber
purge air to a dew point of -70°C (-94°F).
AttoGuard The AttoGuard extends the instrument guard under, around, and over the wafer,
providing shielding to femtoamp levels. AttoGuarding also reduces residual
chuck capacitance from hundreds of pF to 1pF and below.
Boom Stand The boom stand is a microscope attachment system that allows you to swing the
microscope away from the work area.
Chuck Bias Chuck bias is an option to apply a voltage to the chuck and, therefore, to the wafer
or substrate for DC/CV tests.
Computer Cascade's Windows-based prober control software package runs on an IBM-
compatible PC computer.
Connection
Panel Option
The connection panel option consists of triax BNC and banana/pin jack
connectors, and a vacuum manifold. Provides feed-through connectors to reduce
strain on probes and positioners. Reduces triboelectric noise.
Cooler/
Circulator
The Cooler/circulator is a device that chills the thermal chuck to the set low
temperature.
DDE Server The Dynamic Data Exchange (DDE) application software provides communication
with other application software running on your computer. Refer to the Probe
Station Communications Guide or the DDE Server online Help.
Dry Air Dry air can be air or nitrogen with a dew point of -70°C (-94°F).
DUT DUT is Device-Under-Test. It can be a wafer, substrate, or other circuit to be tested.
FC-77 Also called Flourinert. Alternate coolant used in cooler/circulator for thermal
probe station. It is inert, non-toxic, and non-flammable.
FemtoGuard The FemtoGuard increases chuck guarding to enable current measurements in the
low femto-amp range.
Guarded
Chuck
The Guarded chuck reduces leakage currents by using a conductive material that
is nearly at the same potential as the signal that you are trying to measure. It is
electrically isolated from the rest of the probe station and includes connections to
apply a voltage to the DUT for DC and CV characterization.
Isopropyl
Alcohol (IPA)
IPA is a toxic, flammable fluid approved for cleaning chuck top and exterior
surfaces.
Joystick The joystick is a device for controlling the x-y stage motion. The joystick is
activated by Cascade's joystick software application.
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• Summit 11K/12K Probe Station User’s Guide
Manifold
The manifold, a box-like enclosure located at the back of the probe station, includes
vacuum and electrical connections. The manifold distributes the control signals to
the probe station.
Methanol Methanol (methyl-alcohol) is an alternate coolant used in a thermal probe station’s
cooler/circulator. It is toxic and flammable.
MicroChamber The MicroChamber is an enclosure system that provides light and EMI-shielding
in the chuck and test area. It also provides environmental control.
Olympus
Mounting
Bracket
The Olympus mounting bracket is also called the bonder arm or focusing block. It
is hardware that connects the Olympus Stereo Zoom microscope to the boom stand
arm or Optic Bridge Mount. Includes the vertical focus adjustment knob.
Optics Bridge
Mount
The optics bridge mount is a structure that holds a microscope over the work area
and allows the microscope to move in x, y, and z.
PCS PCS is prober control software. See also, the PCS User Guide, and PCS online help.
Platen The platen is the flat, rigid top surface of the probe station for probe positioner
placement.
Positioners Probe holders that fasten securely to the platen by clamp, vacuum, or magnet. The
positioners adjust the probe location in x, y, and z. Some positioners include
planarity adjustments.
Probe The probe is the test device that contacts the DUT to pick-up a signal.
Sliding Plates Sliding plates close on the probe arms to seal-off light from entering the TopHat,
and therefore the MicroChamber.
Thermal
Controller
The thermal controller controls the chuck temperature inside the MicroChamber.
TopHat The TopHat sits above the MicroChamber. It is a hexagon enclosure with sliding
plates for positioner arms and probe cables, and includes a cover with a
microscope aperture seal.
Triax Manifold The triax manifold is a connection panel located on the back of the platen of the
large-area, or on top of the high-stability microscope bridge. It features
feed-through triax connectors.
Verify Verify is the verification utility software that tests hardware operation for selected
components. See also, the Verifying section in this guide and refer to Verify online
help.
WinCal Windows-based VNA calibration application software. See also, the WinCal User
Guide, and WinCal online help.
X-Y Stage The X-Y stage refers to the movable portion of the probe station that supports the
chuck and moves laterally in the X and Y-axes.
Z-Lever The Z-lever is the arm on the left side of the probe station that raises or lowers the
platen. The DUT remains in focus while the stage moves.
Z-Lever
Friction
Adjustment
Screws
The Z-lever friction adjustment screws regulate the mechanism that applies
friction to the Z-lever to hold the platen in place when it is raised