晶圆测试说明书Cascade-11861-6-Manual.pdf - 第107页
Index • 83 roll-out stage 56 theta adjustments 55 Verifying, 12000-series 59 Voltage fluctuation 10 W Wafer not held on chuck 71 to load 63 Wafer, 11000-series load 63 unload 63 X X-Y stage 4 X-y stage 55 , 55 does not m…
Index •
81
Index Chapter 1
Numerics
11700-series applications 7
12100-series
specifications
15
12500-series
specifications
16
12600-series
specifications
17
12700-series
specifications
17, 18, 24
12700-series applications 7
A
Accessories 7
standard 9
Air connections 39
Air dryer
controls
10
MicroChamber purge 62
operating temperature 62
troubleshooting 73, 74
Altitude 10
Applications, 11700- & 12700-
series
7
AttoGuard 2
B
Back cover 32
Bolts
removing
28
Bridge mount 7
C
Cable
HP41XX
39
Quadrax 39
Cables
computer
39
install 39
CE safety standard vii
Chuck
bias cables
49
cleaning 65
thermal, accessories 9
Chuck, 11000-series
specifications
19
Chuck, 11100-series
specifications
20
Chuck, 11500-series
specifications
21
Chuck, 11600-series
specifications
22
Chuck, 11700-series
specifications
23, 24
Chuck, 12000-series
specifications
14
Chuck, 12100-series
specifications
15
Chuck, 12500-series
FemtoGuard
2
specifications 16, 21
Chuck, 12600-,12700-series
bias voltage
10
electrical isolation 10
thermal 10
Chuck, 12600-series
specifications
17
Chuck, 12700-series
specifications
17, 18, 23, 24
Cleaning 65
Computer
cables
39
failure 70
install 39
Conditions
environmental
10
Configurations 9
Connections
air
39
control cables 39
power cords 39
vacuum 39
Control cable connections 39
Control locations 55
conventions, notational ii
Counter-balance
optics bridge
41
Customer service 69
RMA number 77
D
DCM positioners 8
Declaration of conformity xv
Dimensions
11000-series
19
12000-series 13
Dry air requirements 13
E
Emergency off button 53
EMO 53
Environmental conditions 10
ETL safety standard vii
F
FemtoGuard 2
Frost in MicroChamber 73, 74
Fuses 72
computer 70
driver module 70
microscope light 72
G
Glossary 79
Guarded probe station 16
Guarded thermal probe station,
12700-series
17, 18, 24
H
High-Stability bridge mount 7
Hoses
install
39
HP4142 cable 39
HP4145 cable 39
Humidity 10
I
Identifiers iii
Installation
packing materials
25
tools 25
Interlock 3
Interlock switch
MicroChamber door
viii
IPA 65
Isopropyl alcohol 65
J
Joystick
troubleshooting
71
Joystick, 12000-series 61
testing 61
L
Laser warning vii
Lifting handles 28
Lifting requirements 25
Lock Out / Tag Out vii
Locking workstation
lock button
vii
with password vii
without password vii
Low-current measurements 74
82
• Summit 11K/12K Probe Station User’s Guide
M
Maintenance
cleaning
65
monthly 65
z-lever 66
Manual station tests 53
12000-series 53
Measurements
low current
74
MicroChamber
cleaning
65
door interlock 49
frost or moisture 73, 74
interlock 3
purging 10
TopHat 43
MicroChamber door
interlock switch
viii
MicroChamber, 11000-series
specifications
19
MicroChamber, 12000-series
specifications
13, 15
MicroChamber, 12500-series
access door
1
Microscope
light not on
72
Microsoft windows 4
Moisture in MicroChamber 73, 74
N
notational conventions ii
O
Optics bridge
counter-balance
41
planarize 42
Optics bridge mount
shipping restraints
34
P
Planarity
11100-series
20
11500-series 21
11600-series 22
11700-series 23, 24
12000-series 14
12500-series 14
12600-series 14
12700-series 14
Planarize
optics bridge
42
Platen
adjusting z-lever
66
shipping restraints 30
Platen, 11000-series
specifications
19
Platen, 12000-series
specifications
14
Positioner vacuum 44
Positioners
install
43
Power
safety interlock
49
Power cords
connections
39
Power requirements, 12000-series
13
Probe card adapter 9
Probes
install
43
Q
Quadrax cable 39
R
Rail plate 32
README file v
Returning the station 77
RF positioners 8
install 45
RMA number 77
Roll-out stage 5
shipping restraints 29
S
Safety
environmental conditions
10
summary vii
Safety standards
CE
vii
ETL vii
SEMI S3-0200 vii
SEMI S3-0200 safety standard vii
Shipping block 33
Shipping bracket 31
Shipping equipment 25
Shipping restraints
removing
28
Shorting link, 12000-series 5
Stage 55, 55
Stage, 11000-series
specifications
19, 19
Station accessories 7
T
Temperature 10
Tests, 12000-series 59
Thermal chuck, 12600-,12700-
series
10
Thermal controller 10
Thermal probe station, 12600-
series
17
Thermal unit
shutdown
73
temperature mismatch 73
Tools for installation 25
TopHat
install
47
Troubleshooting 69
12000-series
ground loops
5
air dryer 73, 74
computer 70
cooler/circulator 73
customer service 69
frost in MicroChamber 73, 74
joystick 71
microscope light 72
Summit 10600 73
thermal unit 73
vacuum 71
Wafer 71
x-y stage 70, 71
U
Unpack probe station 27
V
Vacuum
not detected
71
positioner 44
Vacuum hose, 11000-family 40
Vacuum line connections 39
Vacuum requirements, 12000-
series
13
Vacuum switch settings, 11000-
series
57
Verify window, 12000-series 59
Verify, 12000-series
clear test results
60
exercise 60
exiting 60
joystick test 61
launching 59
virtual mode 60
Verifying, 11000-series 53
chuck vacuum controls 57
Index •
83
roll-out stage 56
theta adjustments 55
Verifying, 12000-series 59
Voltage fluctuation 10
W
Wafer
not held on chuck
71
to load 63
Wafer, 11000-series
load
63
unload 63
X
X-Y stage 4
X-y stage 55, 55
does not move 71
whines 70
X-y stage, 12000-series
joystick mode
61
specifications 15
Z
Z-lever
adjusting friction
66