晶圆测试说明书Cascade-11861-6-Manual.pdf - 第2页
© Copyright 2000 by Casca de Microtech, Inc. All rights reserved. No part of this manual may be reproduced or transm itted in any form or by any means, electronic or mechanica l, including photocop y, recording, or any i…
Technical Publication
Innovating Test
Technologies
For Better
Measurements
Faster
Summit 11K/12K Probe Stations
User’s Guide Chapter 1
PN 106-914
Revision E
Revised 8/23/01
Cascade Microtech, Inc.
2430 NW 206
th
Ave., Beaverton, Oregon 97006
Toll Free: 1-800-550-3279 • Telephone: (503) 601-1122 • Fax: (503) 601-1111
Email: tech_support@cmicro.com • www.cascademicrotech.com
Japan: (81) 03-5478-6100 • Email Japan: tech_support_cmj@cmj.co.jp
Europe: (44) 1295-812828 • Email Europe: tech_support_cme@cmicro.com
©
Copyright 2000 by Cascade Microtech, Inc. All rights reserved. No part of this manual
may be reproduced or transmitted in any form or by any means, electronic or
mechanical, including photocopy, recording, or any information storage and retrieval
system, without permission in writing from Cascade Microtech, Inc.
Requests for permission to make copies of any part of this manual should be mailed or
faxed to:
Cascade Microtech, Inc.
2430 NW 206
th
Ave.
Beaverton, Oregon 97006 USA
Tel: (503) 601-1122
Fax: (503) 601-1111
The following are trademarks of Cascade Microtech:
• AIR COPLANAR PROBE
®
• CASCADE MICROTECH and Design
®
•EZ-PROBE
®
• FEMTOGUARD
®
• MICROCHAMBER
®
• MICROPROBE UPDATE
®
•PYRAMID PROBE
®
• SURROGATE CHIP
®
•TOPHAT
™
• EYE-PASS PROBE
™
† All other trademarks, registered trademarks, service marks, and trade names are the
property of their respective owners.
Before You Begin
•
i
Before You Begin Chapter 1
About This Guide
Welcome to the Summit 11000- and 12000-Series Probe Station User’s Guide. This
guide contains information about installing, verifying, operating, and
maintaining your probe station.
• The Summit 12000-series 200-mm (8-inch) probe stations are referred to in this
manual as the 12000-series.
• The Summit 11000-series 200-mm (8-inch) probe stations are referred to in this
manual as the 11000 -series.
• A member of either series is referred to as a probe station.
Variations of these series are available, such as the 150-mm (6-inch) probe station,
and those stations with high-temperature (HT) configurations.
GUIDE CONTENTS
This guide covers hardware installation, operation, and maintenance for the
Summit 11000- and 12000-series probe stations.
The 12000-series probe station comes with the following information:
• Programming Communications Guide
• Prober Control Software User’s Guide and online Help
• Probe plan Editor User’s Guide and online Help
• WinCal User Guide and online Help (if ordered)
• GPIB online Help
• Verify online Help
• DDE online Help
• DC/CV Parametric Configuration Guide
For information on installing, operating, and maintaining other parts of your test
system, see the following:
• Software documentation
•Probe documentation
• Positioner documentation
• Test equipment literature
• Microscope documentation
• Thermal equipment documentation