晶圆测试说明书Cascade-11861-6-Manual.pdf - 第21页
Contents • xix Chuck Specifications ..................... ..................... ......................... ................ 23 Total System Planarity ................ ......................... ......................... ..…
xviii
• Summit 11K/12K Probe Station User’s Guide
Environmental Conditions .............................................................................10
Thermal Controls ............................................................................................... 10
Thermal Controller and Cooler/Circulator ..................................................10
Air Dryer ...........................................................................................................10
Thermal Chuck ................................................................................................10
Station Specifications 13
All Series .............................................................................................................13
Facility Requirements .....................................................................................13
High-Stability Microscope Bridge Mount Option ........................................13
Computer ........................................................................................................13
12000-Series .......................................................................................................13
Dimensions ......................................................................................................13
Total System Planarity ....................................................................................14
12100, 12500 .................................................................................................14
12600, 12700, 12800 .....................................................................................14
Platen ............................................................................................................... 14
Roll-Out Stage ................................................................................................. 14
Chuck .............................................................................................................. 14
X-Y Stage ......................................................................................................... 15
Z Stage .............................................................................................................15
MicroChamber ............................................................................................... 15
12500, 12600, 12700, 12800 .........................................................................15
12100 Probe Stations ......................................................................................15
Chuck Specifications ...................................................................................15
12500 Guarded Probe Stations .....................................................................16
Chuck Specifications ...................................................................................16
12600 Thermal Probe Stations .......................................................................17
Chuck Specifications ...................................................................................17
12700 Guarded Thermal Probe Stations ......................................................17
Chuck Specifications ...................................................................................17
12800 Guarded Thermal Probe Stations ......................................................18
Chuck Specifications ...................................................................................18
11000-Series .......................................................................................................19
Dimensions ......................................................................................................19
Platen ............................................................................................................... 19
Rotary Stage ...................................................................................................19
Roll-out Stage ..................................................................................................19
Chuck .............................................................................................................. 19
X-Y Stage ......................................................................................................... 19
MicroChamber ............................................................................................... 19
Chuck Specifications ...................................................................................20
Total System Planarity ..................................................................................20
11500 Guarded Probe Stations .....................................................................21
Chuck Specifications ...................................................................................21
Total System Planarity ..................................................................................21
11600 Thermal Probe Stations .......................................................................22
Chuck Specifications ...................................................................................22
Total System Planarity ..................................................................................22
11700 Guarded Thermal Probe Stations ......................................................23
Contents •
xix
Chuck Specifications ...................................................................................23
Total System Planarity ..................................................................................23
11800 Guarded Thermal Probe Stations ......................................................24
Chuck Specifications ...................................................................................24
Total System Planarity ..................................................................................24
Installing 25
Before Installing .................................................................................................25
Lifting Requirements .......................................................................................25
Tools Needed ..................................................................................................25
Installation Overview ........................................................................................25
Unpack ............................................................................................................27
To unpack your probe station ....................................................................27
Remove and Save Shipping Restraints ........................................................28
To remove the roll-out stage shipping restraints .......................................28
To remove the GT chuck shipping restraints .............................................29
To remove the platen lift handle shipping restraint .................................29
To remove the platen shipping restraints ..................................................30
To remove the x-y stage shipping restraint ...............................................31
Large-Area Microscope Bridge Mount ........................................................31
To remove the optics bridge mount shipping restraints ..........................31
To remove the shipping blocks and spacers ............................................31
High-Stability Microscope Bridge Mount .....................................................33
To remove the optics bridge mount shipping restraints ..........................33
Mounting a Microscope ................................................................................35
To mount the Mitutoyo FS-60 Finescope ...................................................35
To mount the Optem A-Zoom microscope ..............................................36
To mount the Olympus Zoom Stereo microscope ...................................38
Install the Computer and Hoses ...................................................................39
To install the computer, cables, and hoses ..............................................39
Connect the Chuck Vacuum Hose .............................................................40
To connect the chuck vacuum hose ........................................................40
To add counterbalance weights ...............................................................41
To add weight to the counterbalance .....................................................41
To planarize the large-area optics bridge ................................................42
Installing Positioners and Probes ...................................................................43
To mount DCM positioners ..........................................................................43
To connect positioner vacuum ..................................................................44
Mounting RF Positioners .................................................................................45
To install the positioners one at a time ......................................................46
Installing the Probe Card Holder ..................................................................47
Installing the TopHat .......................................................................................47
To install the MicroChamber TopHat .........................................................47
Install Chuck Bias and Door Interlock ...........................................................48
Electrical isolation and chuck biasing .......................................................48
Safety interlock switch .................................................................................50
Thermal Equipment Installation .....................................................................50
Verifying and Operating 53
Using the Emergency Off Button (EMO) .........................................................53
Verifying the 11000 or 12000-Series Probe Station Manually ........................54
xx
• Summit 11K/12K Probe Station User’s Guide
Verifying the Z-lever ....................................................................................... 54
Verifying X- and Y-Axis Stage Movements ..................................................55
Verifying Theta Adjustments ..........................................................................55
Verifying the Roll-Out Stage ..........................................................................56
Verifying Chuck Vacuum Controls ...............................................................57
Verifying the Microscope and Video Adjustments ....................................58
Nucleus software supports the programmable scope transport if the op-
tional autoprobe module (PN 123-567) is purchased. This module controls
the ECX-56 Box accessories. .........................................................................58
Verifying the 12000-Series Station with Software ...........................................58
Launching Verify .............................................................................................59
Running the Verify Software ..........................................................................59
To execute the tests .....................................................................................60
To view a test’s dialog box without running the test ...............................60
To clear the results of tests ..........................................................................60
To run tests repeatedly ................................................................................60
To exit verify ..................................................................................................60
To get more information on verify software ..............................................60
Verifying the Joystick ........................................................................................61
Testing the Thermal Chuck .............................................................................. 61
First Step ...........................................................................................................61
Purge the MicroChamber with dry air .......................................................61
Second Step ...................................................................................................62
With the Temptronic controller, fill the coolant reservoir ......................... 62
Air Dryer Settings .......................................................................................... 62
Handling Wafers with the MicroChamber ..................................................... 62
To load a wafer ............................................................................................63
To unload a wafer ........................................................................................63
Maintaining 65
Preventive Maintenance Procedures ............................................................65
Cleaning the Probe Station ...........................................................................65
To clean the probe station .........................................................................65
Checking Z-Lever Friction ..............................................................................66
To check Z-lever friction ..............................................................................66
Maintaining Probe Station Accessories .......................................................67
Troubleshooting 69
Symptoms and Solutions ..................................................................................69
Computer Does Not Turn On; Nothing Works .............................................70
Stage Whines on Attempted Move .............................................................70
X-Y Stage or Z Stage Does Not Move ..........................................................71
Vacuum Not Detected by Sensor or Wafer Not Held on Chuck ..............71
Joystick Error Message or Stage Wanders in Joystick Mode ..................... 71
Microscope Light is Not On ...........................................................................72
Auxiliary Power Does Not Function ............................................................... 72
Thermal Station Symptoms and Solutions ...................................................... 73
Thermal Controller Shuts Down .....................................................................73
Set and Actual Temperature Do Not Match ..............................................73
Frost or Moisture Appears in the MicroChamber ........................................73
Frost or Moisture Outside the MicroChamber .............................................74