晶圆测试说明书Cascade-11861-6-Manual.pdf - 第25页
Chapter 1: Station Overview • 1 CHAPTER 1 Station Overview Chapter 3 This overview covers: • General features of th e Summit 11000-series (manually-opera ted) and 12000- series (semiautomatic) analytical probe stations •…
xxii
• Summit 11K/12K Probe Station User’s Guide
Chapter 1: Station Overview
•
1
CHAPTER
1
Station Overview Chapter 3
This overview covers:
• General features of the Summit 11000-series (manually-operated) and 12000-
series (semiautomatic) analytical probe stations
• Applications
• Facilities and computer requirements
• Optional accessories
• Standard accessories
• Recommended configurations
• Environmental considerations
• How to use the emergency stop button (EMO)
Features
The Summit 11500-, 12500-, 11600-, 12600-, 11700-, 12700-, and 11800-, 12800-series
probe stations enable you to make test measurements inside an integral, low-
noise, shielded and light-tight MicroChamber.
CHUCK: SUMMIT 11500, 12500, 11700, 12700 AND 11800, 12800
This chuck is isolated and guarded, making it ideal for ultra-low-level leakage DC
and CV measurements. The chuck guard connects to the external test equipment’s
Source Monitor Unit (SMU) guard. A connection panel provides convenient
triaxial or quadraxial connections.
The low-capacitance, guarded-chuck environment enables you to make accurate
current and voltage measurements. The chuck significantly reduces
measurement-settling time and eliminates the need to make offset capacitance
corrections.
Two Kelvin-type triax connectors for chuck-bias voltage and sense, or for chuck
grounding, are located on the left back of the MicroChamber. The access door
includes an interlock switch and connector so you can automatically turn off the
chuck biasing power supply when you open the door.
Guarded Thermal Chuck Option
A guarded version of the thermal chuck reduces chuck noise down to femtoamp
level.
2
•
Summit 11K/12K Probe Station User’s Guide
FemtoGuard/AttoGuard Chuck Options
The patented FemtoGuard/AttoGuard chucks and guarded coaxial probes
provide an ultra-low capacitance for swept measurements without capacitive
error currents.
The FemtoGuard option increases guarding on the chuck and in the
MicroChamber so you can measure currents in the low femtoamp range.
The AttoGuard option extends the instrument guard under, around, and over the
wafer, providing shielding to femtoamp noise levels.
MICROCHAMBER
The patented MicroChamber is an enclosure surrounding the chuck, providing a
controlled probing environment that shields wafer and probes from moisture,
light, and electrical noise.
•The wafer is protected inside the MicroChamber. Probes are never jarred off
submicron targets by closing dark box or MicroChamber doors.
• You can electrically isolate the MicroChamber from the probe station and
purge it with dry air or inert gas.
Fig. 1. Summit 11500, 11700, 12500, 12700 and 12800 Guarded Chuck Connections.
Chuck shield layer and
MicroChamber connection
Chuck bias
triax connector
Chuck guard layer
connection
Chuck surface
connection
Guard ring
Fig. 2. Attoguard.