晶圆测试说明书Cascade-11861-6-Manual.pdf - 第30页
6 • Summit 11K/12K Probe Station User’s Guide A separate vacuum connection panel kit is available for the high-stability bri dge mount. Fig. 5. Connection panel for large-area bridge mount . Fig. 6. Connection panel for …
Chapter 1: Station Overview
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5
Roll-Out Stage
The roll-out stage handle, when unlocked and pulled, moves the stage to the front
(travel: 25 cm) of the probe station (fig. 3 on p. 3). With the stage in this forward
position, you can safely load and unload wafers.
CAUTION
Make sure the Z-lever is up when you pull the rollout stage handle. Otherwise, you
can scrape probes across the chuck and substrate, which will damage the wafer
and probes.
Rotating the Chuck
The chuck rests on a rotary stage, enabling you to rotate it ±7° (1° per turn). Turn
the theta control to rotate the chuck (fig. 4).
CONNECTION PANELS
Optional probe connection panels (at the rear of the platen) provide a convenient
attachment point for test instruments. The connection panels relieve cable strain
and enable you to make stable measurements.
There are two versions— the large-area microscope bridge mount and the high-
stability microscope bridge mount.
The large-area bridge mount includes a removable vacuum panel, which has six
pairs of barb connectors and switches, enabling you to connect up to six vacuum-
mounted positioners.
The high-stability tilt-back bridge mount uses a fixed vacuum connection panel.
Triaxial and BNC feed-through connectors are available, as well as banana-jack to
pin-jack connectors. Use of the triax and BNC connectors, and the banana posts
on the probe station, reduce strain on the probes and cables. They also limit probe
cable movement, which provides additional measurement stability. The triax and
BNC connectors interface from front to back, directly across the panel. The
banana-post and pin-jack connectors are color-coded to indicate internal
connections. Cables are attached from the probes to the front connectors and from
your measurement devices to the rear connectors.
The shorting link grounds the top of the station when it is connected. If you have
trouble with ground loops, you can disconnect the shorting link without
damaging your test equipment or creating hazardous working conditions.
Isolation diodes limit voltage on the platen to ±0.7 V to protect you and your test
equipment.
6
•
Summit 11K/12K Probe Station User’s Guide
A separate vacuum connection panel kit is available for the high-stability bridge
mount.
Fig. 5. Connection panel for large-area bridge mount.
Fig. 6. Connection panel for high-stability bridge mount (left and right).
Chapter 1: Station Overview
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7
Applications
The probe station is ideal for testing temperature-sensitive devices because the
MicroChamber's low volume enables rapid temperature cycling and better
temperature control. The station is also useful for testing light-sensitive devices.
Other applications include device and process characterization, as well as
reliability testing. Depending on the probes and accessories that customize this
probe station, you can make:
• DC or capacitance measurements
• High-frequency measurements
Accessories
LARGE-AREA BRIDGE MOUNT
HIGH-STABILITY BRIDGE MOUNT
X-Y travel 203 x 127 mm (8 x 5-inch)
Lift repeatability 1 mil (25.4 µ) typical
Vertical lift range 3-inch (7.6 cm)
Weight supported 20 lb. (maximum)
X-Y travel 25.4 x 25.4 mm (1 x 1-inch)
Lift repeatability 1µ (0.04 mil) typical
Tilt-back range 2 to 3-inch (5.08-7.62 cm)
Weight supported 70 lb. (maximum)