晶圆测试说明书Cascade-11861-6-Manual.pdf - 第33页

Chapter 1: Station Overview • 9 T HERMAL C HUCK C ONTROLLER & A IR D RYER (11600, 1260 0, 11700, 12700) P ROB E C ARD A DAPTER Standard Accessories Your station will come wi th a large assortment of access ories, suc…

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Summit 11K/12K Probe Station User’s Guide

OPTICS

RF POSITIONERS

DCM POSITIONERS

Mitutoyo Finescope 60 with 20X to 4000X magnification range

Olympus ZoomStereo 60 with 20X to 126X magnification range

Optem A-Zoom microscope video system w/125X to 4000X magnification w/

10X objective

Travel 12.7 mm (0.5-inch) in x- and y-axis,

11.7 mm (0.46-inch) in z-axis

Rigidity 100-micron (4 mil) deflection with 500

g (17.5 oz.) force on the connector of

the probe

Resolution 625-micron (25 mil) per turn, or 1.76

micron per degree

Planarization + 5° with micrometer at each arm.

Travel 12.7 mm (0.5-inch) in each axis

(x-y-z)

Rigidity 100-micron (4 mil) deflection with

500 g (17.5 oz.) force on connector of

probe

Resolution 317-micron (12.5 mil) per turn,

or 0.88 micron per degree

Fig. 7. Tilt-back microscope.

Chapter 1: Station Overview

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THERMAL CHUCK CONTROLLER & AIR DRYER

(11600, 12600, 11700, 12700)

PROBE CARD ADAPTER

Standard Accessories

Your station will come with a large assortment of accessories, such as a contact

substrate, dust cover, etc., in addition to those accessories listed below.

11100, 12100

11500, 12500, 11600, 12600, 11700, 12700, 11800, 12800

NOTE

Cascade recommends that you install a triax-shorting plug whenever the station is

not in use to prevent charges from building up in the chuck. We also recommend

that you install the triax-shorting plug when you are not measuring substrate

current or biasing the chuck.

Recommended Configurations

For DC or capacitance measurements, Cascade recommends:

• DCM vacuum-base or fixed-base DC and RF positioners with low current

(LC) triax adapters

• DCP probes in standard or Kelvin configurations

• LC cables and accessories for low-level measurements

Available temperature ranges -65 °C to 200 °C or 0 °C to 200 °C (300

°C for HT versions)

Air dryer option available yes

Manufactured by Temptronic Corp.

Probe card dimensions 4.5-inch wide

Manual Wrench set

Appropriate power cords for country

of use (12100)

Manual Wrench set

Microscope eyepiece covers Appropriate power cords for country of use

Microscope grounding clip Interlock cable

Triax cap (N/A for 11100,

12100, 11600, 12600)

Triax shorting plug (N/A for 11100, 12100, 11600,

12600)

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Summit 11K/12K Probe Station User’s Guide

• For high-frequency measurements, Cascade recommends:

• DC and RF positioners

• HPC-series probes or ACP-series probes

• RF cables, elbows, and accessories

ENVIRONMENTAL CONDITIONS

Your probe station works safely in the same environment as your PC. Use the

probe station under the following environmental conditions:

• Indoors only

• Altitude up to 2000 m

• Temperature 5 °C to 40 °C

• Maximum relative humidity 80% for temperatures up to 31 °C decreasing

linearly to 50% relative humidity at 40 °C

• Main supply voltage fluctuations not to exceed ± 10% of the nominal voltage

CAUTION

A total current of 3.2/1.6 A is required for both auxiliary and microscope outlets.

The combined leakage current of accessories attached to these two outlets must

be less than 2.85 mA.

Thermal Controls

(11600, 11700, 11800, 12600, 12700, and 12800 Only)

These thermal probe stations include the thermal chuck with a chuck bias

connection located at the left back of the MicroChamber. The thermal controller

and cooler/circulator, and air dryer are options.

See thermal

controller

documentation for

more information

on thermal

equipment controls

THERMAL CONTROLLER AND COOLER/CIRCULATOR

The thermal controller and cooler/circulator maintain the desired test

temperature of the thermal chuck. A power cable heats the chuck. The cooler/

circulator pumps coolant fluid through the chuck to chill it.

The MicroChamber access door includes an interlock switch that you can connect

to a warning indicator. This indicator prevents injury if the chuck is at a thermal-

extreme when the MicroChamber door is open.

AIR DRYER

The air dryer unit dehumidifies the air used to purge the MicroChamber. This

prevents frost from forming during cooling. Alternatively, you can use dry

nitrogen or another inert gas to purge the MicroChamber.

THERMAL CHUCK

The thermal chuck is electrically isolated from the rest of the probe station.