晶圆测试说明书Cascade-11861-6-Manual.pdf - 第38页

14 • Summit 11K/12K Probe Station User’ s Guide T OTAL S YSTEM P LANARITY 12100, 12500 Planarity includes error from wafer chuck, theta rota tions, and tr avel flatness. 12600, 12700, 12800 Planarity includes all error s…

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Chapter 2: Station Specifications •
13
CHAPTER
2
Station Specifications Chapter 4
All Series
FACILITY REQUIREMENTS
See also, the Summit 11K/12K section of Cascade’s Probe Station Facility Guide.
HIGH-STABILITY MICROSCOPE BRIDGE MOUNT OPTION
COMPUTER
Call Cascade’s Customer Support for the latest requirements. See also,
www.cascademicrotech.com.
12000-Series
DIMENSIONS
Vacuum 400 mm (15-inches) of Hg min.
Power 115 V at 2 A, 230 V at 1 A, 50/60 Hz
Dry air 4.3 liters per sec. (9 SCFM) with dew
point < -70 °C. Can be produced with
optional air dryer.
Additional requirements As needed for thermal controller.
Compressed air 0.1 liters/sec (0.2 CFM@ 70 psi. min.)
Base dimensions 76 cm (30 in.) wide x 68 cm (27 in.)
deep
Typical height to eye pieces 58 cm (23 in.)
Weight 165 kg (360 lb.) including optics mount,
not including microscope
14
• Summit 11K/12K Probe Station User’s Guide
TOTAL SYSTEM PLANARITY
12100, 12500
Planarity includes error from wafer chuck, theta rotations, and travel flatness.
12600, 12700, 12800
Planarity includes all error sources.
PLATEN
ROLL-OUT STAGE
CHUCK
For in-depth chuck specifications, see the individual station numbers.
Total system planarity <20 micron (0.8 mil) across 101 mm
(4 in.) circle
<30 micron (1.2 mil) across 203 mm
(8 in.) circle
Total system planarity <30 micron (1.2 mil) across 101 mm
(4 in.) circle
<40 micron (1.6 mil) across 203 mm
(8 in.) circle
Rigidity <50 micron (2 mil) for 4.5 kg (10 lb.)
lateral or vertical force
Z-lift range 5.5 mm (0.22 in.) linear lift
Z-lift repeatability < 2 micron (0.08 mil)
Material Nickel-plated steel
Travel 25 cm (10 in.)
Size 200 mm (8 in.) diameter
(150 mm on 6-in. stations)
Travel, rotation ±7°
Resolution, rotation 1° per turn
Surface Gold-plated or nickel-plated aluminum, with
provisions for grounding or biasing
Chapter 2: Station Specifications •
15
X-Y STAGE
a
Repeatability and accuracy specs are one sigma.
Z STAGE
a
Repeatability and accuracy specs are one sigma.
MICROCHAMBER
12500, 12600, 12700, 12800
12100 PROBE STATIONS
The 12100 probe stations are designed so that they can be easily reconfigured and
upgraded.
Chuck Specifications
Travel 203 mm x 203 mm
(8 in. x 8 in.)
Resolution 0.1 micron (.004 mil)
Bearings Cross-roller
Stage travel speed: >51 mm/second (2 in./second)
Repeatability
a
≤ + 1 micron (.04 mil)
Accuracy
a
≤ + 2 micron (.08 mil)
Travel 5 mm (.20 in.)
Resolution 1 micron (.04 mil)
Stage travel speed: >15 mm/second (.6 in/second)
Repeatability
a
≤ + 1 micron (.04 mil)
Accuracy
a
≤ + 2 micron (.08 mil)
EMI Isolation Yes
Light tight Yes
Enclosure Dry air, inert gas purge capable
Maximum number of positioners Eight DCM (seven with high-power
microscope) or four RF
Flatness 10-micron (0.39 mil) across total
surface
Isolation, chuck to base > 10 TΩ
Auxiliary chucks Two with individual vacuum control
Breakdown bias voltage > 1000-volts
Vacuum distribution area 13, 75, or 152 mm (selectable)