晶圆测试说明书Cascade-11861-6-Manual.pdf - 第43页
Chapter 2: Station Specifications • 19 11000-Series D IMENSIONS P LATEN R OTARY S TAGE R OLL - OUT S TAGE C HUCK For in-depth chuck specifications, see the individual station numbers. X-Y S TAGE M ICRO C HAMBER 11520, 11…
18
• Summit 11K/12K Probe Station User’s Guide
12800 GUARDED THERMAL PROBE STATIONS
The 12800 offers the same thermal testing capacity as a 12700, but with an
advanced reduced-noise thermal chuck. Using Cascade Microtech’s patented
FemtoGuard thermal chuck technology, the 12700 provides wafer temperature
control in a reduced noise and capacitance environment. Chuck noise is reduced
1000-times over standard thermal chucks. The noise on topside probes reduces to
fA levels.
Chuck Specifications
Flatness 25-micron (1 mil) to 130°C, 51-micron
(2 mil) to 200°C
Residual capacitance, chuck to shield 1 pF
Capacitance variation over chuck
surface
3 fF
Isolation, chuck to shield > 1 TΩ
Breakdown bias voltage > 500-volts
Chuck leakage current, thermal
chuck on
0 to 100 volts: < 50 fA
Chuck leakage current, thermal
chuck off
0 to 100 volts, 20 fA
Temperature range
-65 °C to 200 °C maximum (controller
dependent). 300
o
C on HT version.
Temperature uniformity +0.5 °C or 0.5% whichever is higher
Vacuum distribution area 13, 75, or 152 mm (selectable)
Auxiliary chucks Two with individual vacuum control
Chapter 2: Station Specifications •
19
11000-Series
DIMENSIONS
PLATEN
ROTARY STAGE
ROLL-OUT STAGE
CHUCK
For in-depth chuck specifications, see the individual station numbers.
X-Y STAGE
MICROCHAMBER
11520, 11600, 11700, 11800 Only11100 Probe Stations
Base dimensions 68 cm (27 in.) wide x 76 cm (30 in.)
deep
Typical height to eye pieces 55 cm (22 in.)
Weight 150 kg (330 lb.) including optics
mount
Rigidity <50-micron (2 mil) for 4.5 kg (10 lb.)
lateral or vertical force
Z-lift range 5.5 mm (0.22 in.) linear lift
Z-lift repeatability <2-micron (0.08 mil)
Material Nickel-plated steel
Travel +
7°
Resolution 1° per turn
Travel 25 cm (10 in.)
Size 200 mm (8 in.) diameter
(150 mm on 6-in. stations)
Surface Gold-plated or nickel-plated
aluminum, with provisions for
grounding or biasing
Travel 203 mm x 203 mm
(8 in. x 8 in.)
Resolution 0.2 in. per turn (5 mm)
Bearings Cross-roller
EMI Isolation Yes
20
• Summit 11K/12K Probe Station User’s Guide
The 11100 probe stations are designed so that can be easily reconfigured and
upgraded. The following sections describe specifications and requirements.
Chuck Specifications
Total System Planarity
Planarity includes error from wafer chuck, theta rotations, and travel flatness.
Light tight Yes
Enclosure Dry air, inert gas purge capable
Maximum number of positioners Eight DCM (seven with high-power
microscope) or four RF
Flatness 0.39 mils (10 microns) across total
surface
Isolation, chuck to shield > 10 TΩ
Auxiliary chucks Two with individual vacuum controls
Breakdown bias voltage > 1000-volts
Vacuum distribution area 13, 75, or 152 mm (selectable)
Total system planarity <20-micron (0.8 mil) across 101 mm
(4 in.) circle
<30-micron (1.2 mil) across 203 mm
(8 in.) circle