晶圆测试说明书Cascade-11861-6-Manual.pdf - 第5页
Before You Begin • iii • Bit 0 is the low-order bit. If a bit is se t to 1, the associated description is true unless otherwise stated. I DENTIFYING L ABELS —I DENT - S YMBOLE —E TIQUETTES D 'I DENTIFICATION These l…
ii
•
Summit 11K/12K Probe Stations User’s Guide
CHAPTER CONTENTS
NOTATIONAL CONVENTIONS
This manual uses the following conventions:
• When directing the user to a command found on the menus, a vertical hash
mark is used to indicate that a command is nested. So, to direct the user to the
Wafer Map command from the Tools item on the menu, we use Tools | Wafer
Map.
•
Screen text and syntax strings appear in this font.
• All numbers are decimal unless otherwise stated.
Chapter Description
1 Station Overview Describes general features, applications,
accessories, requirements, considerations and
recommendations for using the probe stations
and how to use the emergency stop button.
2 Station Specifications Describes specifications, dimensions and
requirements for all stations in the Summit
series.
3 Installing Provides an overview to installation as well as
requirements for lifting the probe station.
Continues with the unpacking of the station
and its setup.
4 Verifying and Operating Describes how to use the emergency stop
button, verify and use the probe station, and
explains how to test the thermal chuck and
joystick
.
5 Maintaining Explains how to maintain a Summit probe
station using preventative maintenance
procedures.
6 Troubleshooting Lists problems you may encounter while using
Summit probe stations, and explains how to
avoid or resolve those problems.
7 Service Provides contact phone numbers and
instructions to prepare the station for shipping.
Before You Begin
•
iii
• Bit 0 is the low-order bit. If a bit is set to 1, the associated description is true
unless otherwise stated.
IDENTIFYING LABELS—IDENT - SYMBOLE—ETIQUETTES D'IDENTIFICATION
These labels identify parts or system numbers, and grounding points.
IDENT-Symbole – bezeichnen Teile, System-Nummerierungen und
Erdungspunkte
D'autres étiquettes permettent d'identifier les pièces, la numérotation de
l'équipement et des points mis à la terre.
• Model number is located on the lower I/O panel at the rear of the station.
—die Modell-Nummer befindet sich am I/O-Panel an der Rueckseite der
Station.
—Le numéro du modèle se situe sur le panneau inférieur des «entré / sortie»
à l'arrière de l'appareil.
• Serial number is located on the frame rail at the front of the station, inside the
lower-right door.
—die Serien-Nummer befindet sich am Rahmen an der Vorderseite der
Station, Innenseite der rechten Tuer
WARNING is used to indicate the
presence of a hazard which
can
cause severe personal injury,
death, or substantial property
damage if the warning is
ignored.
D
ANGER is used to indicate the
presence of a hazard which
will
cause severe personal injury,
death, or substantial property
damage if the warning is
ignored.
C
AUTION is used to indicate the
presence of a hazard which
will
or
can cause minor personal
injury or property damage if the
warning is ignored.
This includes situations that may
cause damage to hardware via
electrostatic discharge (ESD).
N
OTE is used to indicate
important information about the
product that is not hazard
related.
The globe indicates a World
Wide Web address.
iv
•
Summit 11K/12K Probe Stations User’s Guide
—Le numéro de série se trouve sur le cadre à l'avant de l'appareil, situé à
l'intérieur de la porte inférieure droite.
•
M
odèle S300 Station de Mesures Sous Pointes - Cascade Microtech, Inc. Beaverton, OR
9
7005 Etats Unis - Courant monophasé 50/60 Hz - 115/230 VAC 4.0/2.0 A - Inscrit à ETL -
C
onforme aux standards UL 3101-1 - Certifié à CAN/CSA C22.2 No. 1010.1
Modell S300, Probe-Station—Cascade Microtech, Inc.—Beaverton, OR 97005 USA –
e
inphasig 50/60Hz—115/230 VAC-4.0/2.0 A—ETL eingetragen – entspricht UL Standard 3101-
1—zertifiziert nach CAN/CSA C22.2 No. 1010.1
M
odel 11000/12000 Probe Station—Cascade Microtech, Inc.—Beaverton, OR 97006 USA—
S
ingle Phase 50/60 Hz—115/230 VAC-4.0/2.0 A—ETL Listed—Conforms to UL Standard 3101-
1—Certified to CAN/GSA C22.2 No. 1010.1
Ground
Erdungspunkt / Masse
Prise de terre
Ground
N
º du Modéle—Nº de Serie—Fabriqué par Cascade Microtech, Inc., 2430 NW 206th Ave.,
B
eaverton, OR 97006, USA
Model No.—Serial No.—Manufactured by Cascade Microtech, Inc. 2430 NW 206th Ave.
Beaverton, OR 97006, USA
Modell-Nr.—Serien-Nr.—hergestellt durch Cascade Microtech, Inc. 2430 NW 206th Ave.
Beaverton, OR 97006, USA