晶圆测试说明书Cascade-11861-6-Manual.pdf - 第50页
26 • Summit 11K/12K Probe Station User’ s Guide Vacuum Chuck Positioner Vacuum for optional triax connection panel Microscope Power VNA - Cal To Computer Electrical Connector (Thermal Station Only) Station Input Power BN…
Chapter 3: Installing •
25
CHAPTER
3
Installing Chapter 5
Before Installing
Verify that your work area conforms to the site specifications described in the
Station Overview chapter.
LIFTING REQUIREMENTS
You will need:
• Four or five people to maneuver the probe station onto the table
• Forklift with a minimum 272 kg (600 lb.) capacity
TOOLS NEEDED
You supply a 9/16-in., open-end or socket wrench to remove the bolts on the
shipping crate. We supply a set of hex wrenches for probe station screws.
Installation Overview
Install your probe station using the procedures in this chapter.
You should also refer to this procedure if you are removing your probe station.
WARNING
Several probe station components weigh 23 kg (50 lb) or more; the probe station
weighs over 136 kg (300 lb). To prevent physical injury, refer to and follow lifting
guidelines provided by your company.
Note that this installation procedure may have instructions for station models
with different options.
• Sections may describe generic procedures that apply to all stations
• Sections that apply to a specific model number or option are so labeled
26
• Summit 11K/12K Probe Station User’s Guide
Vacuum
Chuck
Positioner Vacuum
for optional triax
connection panel
Microscope Power
VNA-Cal
To Computer
Electrical Connector
(Thermal Station Only)
Station
Input Power
BNC connector
for MicroChamber
Access Door
Interlock
Auxilliary Power
Inker
Chuck Triax Connectors
or BNC for 12600,
11600, 11100, 12100
Coolant
Connectors
U
Exit Box
Air Hose Connect (dry air)
Fig. 9. 12000-family connection points for large-area bridge (rear view).
Vacuum
Chuck
Microscope Power
VNA-Cal
To Computer
Electrical Connector
(Thermal Station Only)
Station
Input Power
Auxilliary Power
Inker
BNC connector
for MicroChamber
Access Door
Interlock
Optional
Positioner Vacuum Manifolds
Optional Triax Panels
w/shorting link
Coolant
Connectors
Chuck Triax Connectors
or BNC for 12600,
11600, 11100, 12100
U
Exit Box
Air Hose Connect (dry air)
Fig. 10. 12000-family connection points for high-stability bridge (rear view).
Chapter 3: Installing •
27
UNPACK
To unpack your probe station
1. Your probe station weighs approximately 163 kg (360 lb.) by itself. You
received two or more crates that together weigh up to 272 kg (600 lb.).
Position the crates as close as possible to your work area using a forklift
(minimum 272 kg or 600 lb. capacity).
2. Cut the bands holding the crates together. Remove the top crate and set it on
the floor.
3. Your probe station is bolted to a pallet, and then a crate is bolted over the
station. Unbolt (six bolts); lift off the wooden top and set it on the floor.
4. Unpack both crates and check the parts against the packing list.
5. Unbolt the crate sides (eight bolts) and lift them off the station. At this point,
the probe station is still bolted to the bottom pallet.
6. Remove the probe station's plastic vapor barrier so you can see the probe
station.
7. Screw in the lift handles (two on each side). Note that the front handles may
not screw in all the way (fig. 11).
Fig. 11. Lifting handles.