晶圆测试说明书Cascade-11861-6-Manual.pdf - 第54页

30 • Summit 11K/12K Probe Station User’ s Guide T o remove the platen shipping restraints 1. There are three short met al blocks scre wed in place under the platen on the right and left sides of the station. You must car…

Chapter 3: Installing •

2. Remove the #8 screw from the roll-out stage and remove the two foam blocks

between the sliding plates.

To remove the GT chuck shipping restraints

NOTE

High temperature thermal (HT) chucks have similar shipping restraints (marked

with red tag).

1. Use a 7/64-inch hex wrench to remove the restraints.

2. Save all parts.

To remove the platen lift handle shipping restraint

1. Remove the #8 screw on the lift handle (marked with red tag).

CAUTION

Do not raise the platen lift handle until the following second step is completed.

Fig. 13. Shipping restraints between the sliding plates and roll-out stage.

foam blocks inside the microchamber

between the sliding plates and

the rollout stage (2)

#8 screw

Fig. 14. High temperature chuck shipping restraints.

Bracket, top

Bracket, bottom

Bolt

Shipping bolt tag

• Summit 11K/12K Probe Station User’s Guide

To remove the platen shipping restraints

1. There are three short metal blocks screwed in place under the platen on the

right and left sides of the station. You must carefully remove the blocks to

prevent them from falling inside the station (fig. 15).

2. Loosen (1/16 to 1/8-inch), but do not remove, the top #8 screws holding the

blocks in place.

3. Slightly raise the platen (with the Z-lever) to release the pressure on the

shipping blocks.

4. Rotate each block one-quarter turn; hold onto each block; remove its screw;

then remove the block.

Fig. 15. Platen shipping restraints.

Chapter 3: Installing •

To remove the x-y stage shipping restraint

1. Unscrew the (2) #8 screws holding the X-Y stage shipping restraint (marked

with a red tag) and remove (fig. 16).

LARGE-AREA MICROSCOPE BRIDGE MOUNT

To remove the optics bridge mount shipping restraints

The optics bridge has six shipping restraints: two in the front, two in the back, and

two on the counterbalance. To remove them, you need a 9/64-inch hex wrench.

To remove the shipping blocks and spacers

1. With the 9/64-inch hex wrench, remove the two #8-32 screws securing the

shipping bracket to the front of the lift plate and the top plate (fig. 17). Save

the screws.

Fig. 16. X-y stage shipping restraint.

X-Y stage

shipping restraint

Capscrews

Fig. 17. Bridge shipping restraints.