晶圆测试说明书Cascade-11861-6-Manual.pdf - 第59页
Chapter 3: Installing • 35 M OUNTING A M ICROSCOPE Your station can be used with one or more of the following micro scopes (or equivalents): • Mitutoyo Finescope • Optem A-Zoom • Olympus Zoom Stereo T o mount the Mitutoy…
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• Summit 11K/12K Probe Station User’s Guide
1. Remove the 5/16 x 1.25-inch hex head screw, and save it with the shipping
washers and tag the parts.
To remove the restraints in the following two diagrams, you will need a 9/64-inch
hex wrench.
Fig. 22. Shipping restraints (front view).
109-610
Tag, Shipping
Bolt, Red
100-145
Spacer, Bridge
(2 places)
Fig. 23. Shipping restraints (manual head).
100114
BRACKET, SHIPPING, RST-01
251-073
WSHR, #8, FLT
(2 places)
Shipping
Bolt
109-610
TAG, SHIPPING
BOLT, RED
BFW-175088
STANDOFF
SCS-0832-138
SCR, SHC, 8-32 X1.38
211-007
SCR, SHC
8-32 X 0.5
Chapter 3: Installing •
35
MOUNTING A MICROSCOPE
Your station can be used with one or more of the following microscopes (or
equivalents):
• Mitutoyo Finescope
• Optem A-Zoom
• Olympus Zoom Stereo
To mount the Mitutoyo FS-60 Finescope
Prior to mounting the microscope, ensure that the (2) setscrews located on the left
side of the microscope’s mounting plate are unscrewed back out of the way before
mounting on the microscope transport.
Fig. 24. Shipping restraints (motorized head).
Shipping
Bolt
BFW-175088
STANDOFF
100114
BRACKET, SHIPPING, RST-01
251-073
WSHR, #8, FLT
SCS-0832-138
SCR, SHC, 8-32 X1.38
109-610
TAG, SHIPPING
BOLT, RED
211-017
SCR, SHC
10-32 X 0.62
WSHR-010-FL
WSHR, #10, FLT
36
• Summit 11K/12K Probe Station User’s Guide
1. Slide the Mitutoyo FS-60 Microscope on the dovetail mount and tighten the
two setscrews on the left side of the mount with a 5/64-inch hex wrench.
2. Slide the illuminator on the mounting post and hand-tighten the
thumbscrew.
3. Remove the dust guards from the eyepiece port and save them for future use.
4. Insert the eyepieces into the eyepiece ports.
5. Screw up to four objectives into the turret of the microscope.
To mount the Optem A-Zoom microscope
Prior to mounting the microscope, ensure that the (2) setscrews located on the left
side of the microscope’s mounting plate are unscrewed back out of the way before
mounting on the microscope transport.
Fig. 25. Mitutoyo FS-60 microscope assembly.
Setscrews
Objectives
Eyepieces
Eyepiece
Sockets
Iris Control
(Lever at rear)
Camera Port
Gross
Adjustment
Knob
Fine
Adjustment
Knob