晶圆测试说明书Cascade-11861-6-Manual.pdf - 第60页
36 • Summit 11K/12K Probe Station User’ s Guide 1. Slide the Mitutoyo FS-60 Microscope on the dovetail mount and tighten the two setscrews on the left side of the mount with a 5/64-inch hex wrench. 2. Slide the illuminat…
Chapter 3: Installing •
35
MOUNTING A MICROSCOPE
Your station can be used with one or more of the following microscopes (or
equivalents):
• Mitutoyo Finescope
• Optem A-Zoom
• Olympus Zoom Stereo
To mount the Mitutoyo FS-60 Finescope
Prior to mounting the microscope, ensure that the (2) setscrews located on the left
side of the microscope’s mounting plate are unscrewed back out of the way before
mounting on the microscope transport.
Fig. 24. Shipping restraints (motorized head).
Shipping
Bolt
BFW-175088
STANDOFF
100114
BRACKET, SHIPPING, RST-01
251-073
WSHR, #8, FLT
SCS-0832-138
SCR, SHC, 8-32 X1.38
109-610
TAG, SHIPPING
BOLT, RED
211-017
SCR, SHC
10-32 X 0.62
WSHR-010-FL
WSHR, #10, FLT
36
• Summit 11K/12K Probe Station User’s Guide
1. Slide the Mitutoyo FS-60 Microscope on the dovetail mount and tighten the
two setscrews on the left side of the mount with a 5/64-inch hex wrench.
2. Slide the illuminator on the mounting post and hand-tighten the
thumbscrew.
3. Remove the dust guards from the eyepiece port and save them for future use.
4. Insert the eyepieces into the eyepiece ports.
5. Screw up to four objectives into the turret of the microscope.
To mount the Optem A-Zoom microscope
Prior to mounting the microscope, ensure that the (2) setscrews located on the left
side of the microscope’s mounting plate are unscrewed back out of the way before
mounting on the microscope transport.
Fig. 25. Mitutoyo FS-60 microscope assembly.
Setscrews
Objectives
Eyepieces
Eyepiece
Sockets
Iris Control
(Lever at rear)
Camera Port
Gross
Adjustment
Knob
Fine
Adjustment
Knob
Chapter 3: Installing •
37
Obtain the appropriate tool and hardware to mount your microscope on the
optics bridge. See also, the Optem A-Zoom Instruction Manual for specific
installation procedures.
1. Slide the A-Zoom Microscope on the dovetail mount and tighten the two
screws on the left side of the mount with a 5/64-inch hex wrench.
2. Insert the fiber-optic cable into the illuminator and hand-tighten the
thumbscrews.
3. Insert the two eyepieces into the eyepiece sockets (only available with the
optional eyepiece kit). These eyepieces are normally 10x magnification.
4. Screw the objective into the objective mount (finger tight only). Slide the
objective mount into the slot at the bottom of the A-Zoom.
WARNING
Exercise care when mounting the microscope. The weight of the microscope can
cause the lift plate to lower unexpectedly.
5. Move the microscope up and down to test the counterweight.
6. Finish installing microscope video equipment according to the
manufacturer's instructions.
Fig. 26. Installing the Optem A-Zoom microscope.
Microscope Set
Screws
Optional
Eyepiece
Sockets
Dovetail
Objective
Mount
Objective
Lens
Eyepiece