晶圆测试说明书Cascade-11861-6-Manual.pdf - 第63页
Chapter 3: Installing • 39 I NSTALL THE C OMPUTER AND H OSES (12000-Series Only) T o install the computer, cables, and hoses 1. Unpack the computer, the keyboard, th e joystick, the mouse, the cables, and the video monit…
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• Summit 11K/12K Probe Station User’s Guide
To mount the Olympus Zoom Stereo microscope
Prior to installation, obtain a 9/64-inch hex wrench to mount the Olympus
mounting block. Refer to Fig. 4-19 during the following procedure.
1. Mount the mounting block onto the microscope mounting plate, using two #8
x 3/8-inch screws.
2. Place the pivot post into the mounting block.
3. Install the 8-32 x 1/4-inch setscrew in the mounting block (not shown). The
setscrew in the mounting block can be tightened to lock the pivot in place, or
it can be tightened just enough to prevent the pivot post from being pulled
back out of the block, yet allowing the microscope to rotate.
4. Route the cables over the optics bridge and plug into the light source.
5. Plug the light source power into the microscope power extender cable or a
wall outlet.
6. Move the microscope up and down to test the counterweight.
Fig. 27. Installing the Olympus Zoom Stereo microscope.
Lift plate
Pivot post
Mounting Block
Microscope holder
Mounting Block
Screws
Chapter 3: Installing •
39
INSTALL THE COMPUTER AND HOSES
(12000-Series Only)
To install the computer, cables, and hoses
1. Unpack the computer, the keyboard, the joystick, the mouse, the cables, and
the video monitor.
2. Seat the computer under your workbench, and place the keyboard, monitor,
joystick and mouse on the workbench next to the station.
3. Connect the “keyed” cables and hoses as described in Table 1. See also, figure
29 on p. 41.
Table 1. 12000-family probe station cables and hoses.
Cable or Hose From To
main control cable computer connector on
the back side of the
probe station
computer
monitor extender cable monitor connector on
computer
monitor cable
keyboard cable keyboard computer PS2 port
mouse cable mouse computer PS2 port
air line (high-stability
bridge only)
Air in (left rear of station) compressor or air supply
joystick cable joystick computer
Fig. 28. Microscope TopHat seal (left) for Mitutoyo, Optem and Olympus.
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• Summit 11K/12K Probe Station User’s Guide
a
Available only in the U.S. and Japan.
CONNECT THE CHUCK VACUUM HOSE
(11000-Series Only)
To connect the chuck vacuum hose
1. Connect a 1/8-inch diameter hose to the vacuum input on the back of the
probe station. See figure 29 on p. 41.
2. Connect the other hose end to your vacuum source.
3. Connect a 1/8-inch diameter hose to the vacuum input on the back of the rear
connection panel (if ordered). See figure 29 on p. 41.
4. Connect the other hose end to your vacuum source--use a 3-way tee to
connect both vacuum inputs using one vacuum source.
power cable probe station wall outlet
Cable or Hose From To
power cable monitor wall outlet
power cable computer wall outlet
extension power cable
a
(optional)
MICROSCOPE POWER on
probe station
extension power cable
a
(optional)
AUXILIARY POWER on
probe station
black vacuum hose
(for chuck vacuum)
VAC IN on probe station
(Right side of the probe
station.)
optional vacuum pump
-or-
your vacuum source
black vacuum hose (for
vacuum-mounted
positioners). Use 1/8 inch
3-way tee between probe
station and connection
panel.
VAC I N on r e a r
connection panel (if
ordered)
optional vacuum pump
-or-
your vacuum source
Quadrax, BNC, Triax, or
Dual Triax Cable
(HP4142 or HP4145 only)
See Fig. 4-32.
Table 1. 12000-family probe station cables and hoses.