晶圆测试说明书Cascade-11861-6-Manual.pdf - 第73页
Chapter 3: Installing • 49 The chuck is composed of three layers: sh ield, guard , and surface (fig. 37). This structure electrically isolates the surface from the rest of the sta tion, enabling you to use guarded measur…
48
• Summit 11K/12K Probe Station User’s Guide
4. Slide the slotted seals into the TopHat ring and push over the positioner
extender arm.
5. Install the TopHat cover and seal the cover with the objective.
6. Push down the screws to catch the standoffs and finger-tighten.
CAUTION
TILT-BACK BRIDGE
Center the programmable scope transport before raising or lowering the tilt-back
bridge or damage can occur to the probe station and/or accessories. Scope travel
is limited to 1-inch in the x-, y-axes when using the TopHat.
7.Nucleus software supports the programmable scope transport if the optional
autoprobe module (PN 123-567) is purchased. This module controls the ECX-56
Box accessories.
N
OTE
The DC configuration of the TopHat is similar to the preceding graphic. However,
steel/rubber seals slide to allow positioning of the probe arms. This seal provides a
“light tight” environment for the wafer. Note that the TopHat is inverted to allow the
removal of positioners when the lid is removed. A comparable TopHat is shown
below.
INSTALL CHUCK BIAS AND DOOR INTERLOCK
Electrical isolation and chuck biasing
(11500, 11700, 11800, 12500, 12700 and 12800 only)
Fig. 36. TopHat for RF.
Standoffs (4)
Chapter 3: Installing •
49
The chuck is composed of three layers: shield, guard, and surface (fig. 37). This
structure electrically isolates the surface from the rest of the station, enabling you
to use guarded measurement techniques for accurate and rapid current
measurements. Two triax connectors enable you to apply a bias voltage to the
chuck's surface and a guard voltage to the chuck's guard layer.
The chuck-bias triax connectors are located on the back of the station (fig. 38).
• The outer shield of the triax connector makes an electrical connection with the
MicroChamber and the shield layer of the chuck.
• The middle shield of the connector makes a connection to the guard layer of
the chuck (FemtoGuard or AttoGuard)
• The center connector makes a connection with the chuck surface
.
Fig. 37. Chuck layers.
Surface layer
Guard layer
Shield layer
Fig. 38. Chuck triaxial connectors.
Chuck surface
connection
MicroChamber
connection
Chuck guard-layer
connection
50
• Summit 11K/12K Probe Station User’s Guide
Safety interlock switch
To protect you from hazardous voltages and temperature extremes on the chuck,
the MicroChamber access-door has a BNC safety interlock switch. This switch is
closed when the MicroChamber access door is closed and open when the access
door is open. The interlock BNC is located on the back right of the probe station
(see fig. 9 and fig. 10). You must connect a cable from the BNC connector to the
interlock connector on the chuck-biasing power supply and warning indicator.
The MicroChamber door also has a software interlock that can be set to one of
four modes within prober control software (PCS or Nucleus).
THERMAL EQUIPMENT INSTALLATION
Table 2. Probe station, thermal unit cable, and hose connections.
* If you ordered the GPIB option, you'll have to put the GPIB switch box between the
Cable or Hose From To
coolant lines fittings on back of
probe station
fittings on back of
cooler/circulator
thermal power cable MicroChamber power
cable on probe station
THERMAL DEVICE on the
back of the Temptronic
controller
control cable CONTROL INPUT on
back of cooler/
circulator
COOLER on the back of
the Temptronic
controller
controller power cable Temptronic controller 20 Amp (115V) power
source, or 10 Amp
(230V)
air hose air source COMPRESSED AIR INPUT
on air dryer
air hose REGULATED OUTPUT DRY
AIR FLOW on air dryer (if
ordered), or your dry air
supply
air fitting on back of
MicroChamber
GPIB Cable (if you
ordered this option)
See the GPIB Switch Box
Installation Instructions,
P/N 107-109-A
See figure 39
GPIB Cable (if you did
not order this option)
computer Temptronic Controller
air dryer power cable air dryer (if ordered) power source