晶圆测试说明书Cascade-11861-6-Manual.pdf - 第77页

Chapter 4: Verifying and Operating • 53 CHAPTER 4 V erifying and Operating Chapter 6 This chapter ex plains how to: • Use the Emergency Off button (EMO) • Verify and use the 1100 0 or 12000-series probe station • Test th…

• Summit 11K/12K Probe Station User’s Guide

Install coolant

1. Fill the coolant reservoir. See also, the Temptronic manual for additional

information.

2. Check thermal functions.

Chapter 4: Verifying and Operating •

CHAPTER

Verifying and Operating Chapter 6

This chapter explains how to:

• Use the Emergency Off button (EMO)

• Verify and use the 11000 or 12000-series probe station

• Test the thermal chuck (thermal stations only)

• Test the joystick

Using the Emergency Off Button (EMO)

The button will not lock unless it’s pushed, or keyed to lock for maintenance.

1. Identify the “red” button on the right front of the station.

2. Push to stop all movement on station.

3. The system key must be inserted and turned clockwise to release the button

and restore power.

Fig. 41. Emergency Off button (EMO).

• Summit 11K/12K Probe Station User’s Guide

Verifying the 11000 or 12000-Series Probe Station

Manually

We recommend that

you run these tests

on either the 12000-

series or 11000-

series base station.

Before installing any accessories, verify the probe station’s components. Tools are

not needed. This discussion explains how to verify the:

• Z-lever

• X-axis and Y-axis movements

These procedures

assume you are

facing the front of

the probe station.

• Theta adjustments

•Roll-out stage

•Vacuum controls

VERIFYING THE Z-LEVER

Adjust the Z-lever

friction after you

install probes and

accessories. To

adjust, see

Maintaining.

The Z-lever is located on the probe station’s lower-left side. When you raise and

lower the Z-lever, the wafer should stay in focus throughout the platen’s travel.

When operating correctly, the Z-lever stays in the place when you release it.

CAUTION

f the Z-lever friction is not adequate, the platen can drop suddenly and damage

your probes, positioners, and the wafer. Set the friction so that the platen stays in

position when you raise Z-lever.

To prevent damage to the probes, to the chuck surface, or to your wafer, check and

adjust the Z-lever friction as described in Maintaining. Check the friction

adjustment monthly and whenever you change the probing arrangement.

Fig. 42. Z-lever location.