晶圆测试说明书Cascade-11861-6-Manual.pdf - 第8页
vi • Summit 11K/12K Probe St ations User’s Guide
Before You Begin
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Where to Get More Information
ABOUT SUMMIT 11K/12K PROBE STATIONS
You can find out more about Summit probe stations from these sources:
• Readme file: Lists features and issues that arose too late to include in other
documentation.
• World Wide Web: Cascade Microtech maintains an active site on the World
Wide Web. The site contains current information about the company and
locations of sales offices, new and existing products, contacts for sales, service,
and technical support information. You can also send e-mail to Cascade
Microtech using the web site. Requests for sales, service, and technical
support information receive prompt response.
NOTE
When sending e-mail for technical support, please include information about both
the hardware and software, plus a detailed description of the problem, including
how to reproduce it.
WWW
ADDRESS
To access the Cascade Microtech web site, enter this URL in your web browser:
http://www.cascademicrotech.com
• Other: If you purchased your Cascade Microtech product from a third-party
vendor, you can contact that vendor for service and support.
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Summit 11K/12K Probe Stations User’s Guide
Safety Standards
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Safety Standards Chapter 2
Introduction
The information in this guide enables you to operate the equipment safely and
effectively. Any deviation from a recommended procedure, or a modification of
the equipment, may create a hazardous operating situation. Cascade Microtech,
Inc. (Cascade) disclaims any responsibility for consequences resulting from any
such deviation, modification, or application.
In this guide, read and follow the instructions labeled:
• Warning(s) and Danger(s) to prevent personal hazard or injury
• Caution(s) to prevent damage or destruction to equipment, or the loss of
data.
• Note(s) for important information.
The S300 probe station is designed to comply with the ETL safety standard for
laboratory equipment; to comply with European directives for machines and
thus, is CE-marked; to comply with the SEMI S3-0200 international standard for
manufacturing quality within the semiconductor industry.
DANGER
To avoid personal injury from electric shock, ground the controller, probe station,
and monitor with the provided power cords. Do not disable the grounded leads on
the power cords.
For continued protection against risk of fire, replace a fuse on probe station
equipment only with a fuse of the specified type and current rating. To avoid injury,
keep hands, clothing, and jewelry clear of all moving parts.
Several probe station components weigh 23 kg (50 lb.) or more. To prevent
personal injury, refer to and follow the lifting guidelines provided by your company.
Use anti-electrostatic discharge (ESD) precautions when you connect cables. ESD
can damage components.
W
ARNING
Class 3b lasers may be configured on the Summit and are potentially hazardous.
Consult OEM manuals for the provided safety information.
Software Interlocks
LOCK OUT / TAG OUT
See Locking the Workstation in the Nucleus Software User’s Guide.