晶圆测试说明书Cascade-11861-6-Manual.pdf - 第92页
68 • Summit 11K/12K Probe Station User’ s Guide
Chapter 5: Maintaining •
67
5. Recheck the z-lever friction at all positions between fully up and down.
MAINTAINING PROBE STATION ACCESSORIES
If your probe station includes modules, such as a thermal unit that is not
manufactured by Cascade, refer to the manufacturer's documentation for
maintenance procedures. To maintain your Cascade probes and positioners, refer
to the user’s guides for those accessories.
68
• Summit 11K/12K Probe Station User’s Guide
Chapter 6: Troubleshooting •
69
CHAPTER
6
Troubleshooting Chapter 8
If you do not
resolve the failure
after following the
steps in this section,
contact Cascade
Technical Support
at (800) 626-9395
This section covers common probe station problems. Diagnostic and repair
actions are described to help you repair the most common of problems. This
section does not cover invasive troubleshooting or component-level repair.
Attempting to troubleshoot beyond the instructions in this section may cause
further damage to your probe station or related equipment and may also void
your warranty.
Symptoms and Solutions
Find the symptom that most closely matches your problem, and check everything
listed in the table.
For 12000-series stations, run Verify (the hardware verification software), after
you resolve your problem and before you begin operating your probe station.
This section shows how to resolve the following symptoms:
• Computer does not turn on; nothing works (12000-series only)
• X-Y stage makes high-pitched whine when attempting to move (12000-series
only)
• X-Y stage or Z stage does not move
• Vacuum is not detected by the sensor or the wafer is not held on chuck
• Joystick error message on monitor or Stage wanders in joystick mode (12000-
series only)
• Microscope light is not on
The following section shows how to resolve problems with thermal stations:
• Thermal controller shuts down
• Set, and actual temperature do not match
• Frost or moisture appears in the MicroChamber