5OM-1343-008_w - 第62页
2-1 AKFEPED-ID 0604-003 Layout of Sensors and Loads Underframe Layout of Sensors and Loads Underframe Symbol Name Symbol Name BB-M66 V acuum Pump 1 BD-M66 V acuum Pump 2 M105 Underframe Cooling Fan (Front Left Side) M1 1…
2-B
AKFEPED-ID
0601-002
2-1
AKFEPED-ID
0604-003
Layout of Sensors and Loads Underframe
Layout of Sensors and Loads Underframe
Symbol Name Symbol Name
BB-M66 Vacuum Pump 1 BD-M66 Vacuum Pump 2
M105 Underframe Cooling Fan (Front Left Side) M112 Underframe Cooling Fan (Front Right Side)
M106 Underframe Cooling Fan (Rear Left Side) M113 Underframe Cooling Fan (Rear Right Side)
M109
Underframe Left Side Cooling Fan (Front Side)
M116
Underframe Right Side Cooling Fan (Front Side)
M110
Underframe Left Side Cooling Fan (Rear Side
)M117
Underframe Right Side Cooling Fan (Rear Side)
M111 CPU2 (Left) Cooling Fan M118 CPU2 (Right) Cooling Fan
M121
CPU2 (located above the power unit)
Cooling Fan (Left)
M123
CPU2 (located above the power unit)
Cooling Fan (Right)
M122
Conveyer Multiaxis Amplifi er Cooling Fan (Left)
M124
Conveyer Multiaxis Amplifi er Cooling Fan (Right)
S141 Pressure Switch
2-2
AKFEPED-ID
0804-003
Layout of Sensors and Loads Cover
M102
Symbol Name Symbol Name
M101 Ceiling Cooling Fan 1 M102 Ceiling Cooling Fan 2
-S111 Feeder Ready 1 -S111 Feeder Ready 3
-S111 Feeder Ready 2 -S111 Feeder Ready 4
-S112 STAGE 1 READY -S112 STAGE 2 READY
-S131 Cover 1(Rear) -S131 Cover 2(Rear)
-S132 Cover 1(Front) -S132 Cover 2(Front)
-S121 Emergency Stop 1 -S121 Emergency Stop 4
-S105 Emergency Stop 2 -S105 Emergency Stop 5
-S121 Emergency Stop 3 -S121 Emergency Stop 6
Layout of Sensors and Loads Cover