5OM-1343-008_w - 第82页
3-7 AKFEPED-ID Underframe X/Y Servo Section 0601-002 Underframe X/Y Servo Section
3-6
AKFEPED-ID
0604-003
Underframe Power Supply Section
Underframe Power Supply Section
3-7
AKFEPED-ID
Underframe X/Y Servo Section
0601-002
Underframe X/Y Servo Section
3-8
AKFEPED-ID
Underframe X/Y Servo Power Supply Section A
0607-004
Underframe X/Y Servo Power Supply Section A