5OM-1343-008_w - 第83页
3-8 AKFEPED-ID Underframe X/Y Servo Power Supply Section A 0607-004 Underframe X/Y Servo Power Supply Section A
3-7
AKFEPED-ID
Underframe X/Y Servo Section
0601-002
Underframe X/Y Servo Section
3-8
AKFEPED-ID
Underframe X/Y Servo Power Supply Section A
0607-004
Underframe X/Y Servo Power Supply Section A
3-8-1
AKFEPED-ID
Underframe X/Y Servo Power Supply Section B
0604-001
Underframe X/Y Servo Power Supply Section B