5OM-1343-008_w - 第84页
3-8-1 AKFEPED-ID Underframe X/Y Servo Power Supply Section B 0604-001 Underframe X/Y Servo Power Supply Section B
3-8
AKFEPED-ID
Underframe X/Y Servo Power Supply Section A
0607-004
Underframe X/Y Servo Power Supply Section A
3-8-1
AKFEPED-ID
Underframe X/Y Servo Power Supply Section B
0604-001
Underframe X/Y Servo Power Supply Section B
3-8-2
AKFEPED-ID
0607-002
Underframe X/Y Servo Power Supply Section C
Underframe X/Y Servo Power Supply Section C