SI-P850_PL_402 - 第9页
A-1 Unit Layout A1. / Unit Layout ............................................................................................... A-2
A-1
Unit Layout
A1./Unit Layout...............................................................................................A-2
A-2
A1-1
Unit Layout
B1. XYθ Assy
XYθ Table Assy
B2. Z
Assy
Z Table Assy
B3.
Assy
Outer shape control unit Assy
B8.
Assy
Conveyer Assy
B5.
Assy
Camera Assy
B4.
XY Assy
Camera XY Assy
B6.
Assy
Squeegee driving Assy
B7.
Assy
Squeegee hanger Assy
C1.
Assy
Squeegee holder Assy
B9-1,B9-2,B9-3. Assy
Frame Assy