DECAN_S1_Administrator′s_Guide(Eng_Ver1.5)_Print.pdf - 第406页
14-24 Next Generation, Multi-Functional Plac er DECAN S1 Administrator’s Guide 14.3.3. Fiducial Camera Scale Calibration must be performed by using the fiducial camera. Therefore, the scale calibration of the fiducial ca…
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Machine Calibration
3. After confirming that there is no object inside the machine or on the conveyor, click
the <OK> button.
4. Click the <Yes> button.
Click on the <Skew compensation> button. Automatic homing on Z-axis is performed,
Y1-axis motor rotates and moves X frame until detecting the Y home sensor. Once the
home sensor has been detected, move to the Y-axis movement distance (Y Stroke) in
the opposite direction, and move to the opposite direction again until the Y Home
sensor is detected.
5. Then, ‘Skew’ information is shown as follows, and asks whether to apply the value.
6. Click on the <Yes (Y)> button and <Update> button, and then homing of the
equipment is newly done in accordance with the applied skew information.
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Next Generation, Multi-Functional Placer DECAN S1 Administrator’s Guide
14.3.3. Fiducial Camera Scale
Calibration must be performed by using the fiducial camera. Therefore, the scale
calibration of the fiducial camera must be performed first.
If the fiducial camera is not calibrated, the rest of the buttons are disabled.
When the Fiducial Camera Scale Calibration is completed, the <3. Fiducial Camera Scale>
button is not displayed in the “Calibration” window.
<1. Fid. Scale Mark Position> button
Set the position of the fiducial mark (White) located at the top surface of the ANC.
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Machine Calibration
The process of teaching the Fiducial Mark of the ANC top surface using the fiducial
camera is as follows.
1. When performing the mark setup, select the gantry and click the <1. Fid. Scale
Mark Position> button. If the following screen appears, click the <Move> button
in the <Teach> group.
Then the fiducial camera moves to the corresponding position.
2. If the corresponding fiducial mark cannot be recognized correctly, teach the
position of the fiducial mark on the top surface of the ANC. (The size of the
Fiducial Mark is 2.5 mm)
3. If the fiducial mark position teaching is performed accurately, click the <Update>
button to apply the changed value.
<2. Ref. Fid. Camera Scale> button
There is no calibration required to be done in advance in order to calibrate the scale
(um/pixel) and rotation (deg) of the fiducial camera.