DECAN_S1_Administrator′s_Guide(Eng_Ver1.5)_Print.pdf - 第411页
14-29 Machine Calibration 14.3.4. Fiducial Cameras Offset Calibration Measure the distance betw een the center of the gantry's Ref. Fiducial Camera and that of the Other Fiducial Came ras. 1) Click the <4. Fid. C…
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Next Generation, Multi-Functional Placer DECAN S1 Administrator’s Guide
5. When using two fiducial cameras per gantry, press <3. Other Fid. Camera Scale>
button to calibrate it in the same manner.
Memo The reference values for the calibration of the (Ref. / Other) Fiducial
Camera (FOV7.5) is as follows.
ScaleX: 13.0 ~ 17.0 (μm/pixel)
ScaleY: 13.0 ~ 17.0 (μm/pixel)
ScaleR: -0.5 ~ 0.5 (deg)
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Machine Calibration
14.3.4. Fiducial Cameras Offset Calibration
Measure the distance between the center of the gantry's Ref. Fiducial Camera and that of
the Other Fiducial Cameras.
1) Click the <4. Fid. Cameras Offset> button in the <Calibration Menu> group.
Move the Ref. Fiducial Camera to the Mark position set in the Fiducial Camera Scale
Calibration to measure the center position of the Mark.
Next, move the Other Fiducial Camera to the Mark position to measure the center
position of the Mark.
2) Once calibration is completed, the calibration result is displayed as shown in the
following figure. Click the <Update> button to apply the calibration value.
The measurement result can be confirmed in the Head Offset dialog box.
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Next Generation, Multi-Functional Placer DECAN S1 Administrator’s Guide
Ref. The reference value for the calibration of the Other Fid. Cameras is as
follows:
Gantry 1
Offset X: -263 ~ -261 (mm)
Offset Y: -1 ~ 1 (mm)