DECAN_S1_Administrator′s_Guide(Eng_Ver1.5)_Print.pdf - 第461页
14-79 Machine Calibration Memo The reference values for the calibratio n of the R-Axis Of fset is as follows. Real Max(Min): The Max.(Min.) of fset between c ommand value and calibration value Head1~Head10 : -0.5 ~ 0.5…
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Next Generation, Multi-Functional Placer DECAN S1 Administrator’s Guide
4. If the calibration procedure is completed for all heads normally, the result is displayed
as shown in the following figure.
The measurement result can be confirmed in the R Axis dialog box.
14-79
Machine Calibration
Memo The reference values for the calibration of the R-Axis Offset is as
follows.
Real Max(Min): The Max.(Min.) offset between command value
and calibration value
Head1~Head10 : -0.5 ~ 0.5 (deg)
Err Max(Min) The Max.(Min.) offset between compensation
value and calibration value
Head1~Head10 : -0.2 ~ 0.2 (deg)
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Next Generation, Multi-Functional Placer DECAN S1 Administrator’s Guide
14.3.8.11. Beam Offset Calibration
Refers to the calibration measuring the distance between the fiducial camera sensor and
beam sensor. In order to measure the beam offset, the beam sensor to be used in the <Head
Offset> tab of the System menu must be selected first.
Perform calibration of the Beam Offset in the following manner
1. Press the <17. Beam Offset> button to execute the beam offset dialog box.