N7201A617E00_0317 - 第103页

NPM-W 2 EJM7DE-MB-02M-00 Overview 2-1-6 -6

NPM-W2 EJM7DE-MB-02M-00

Periodic inspection points

by unit 3

<Type in common>

2-1-6-5

Maintenance

2-1-6

Over-

view

Main controller

filter

Front side

NPM-W2 EJM7DE-MB-02M-00

Overview

2-1-6-6

NPM-W2 EJM7DE-MB-02M-00

2-1-6-7

Periodic inspection points

by unit 4

<Placement head> (Option)

Maintenance

2-1-6

Over-

view

■Nozzle head

■Nozzle changer

Front and rear sides