N7201A617E00_0317 - 第105页

NPM-W 2 EJM7DE-MB-02M-00 2-1-6 -8 Nozzle reflector Nozzle reflector contact surface Nozz le flange upper surface (2D code area) Nozzle taper surfac e Nozzle tip Light weight 16-nozzle head ■ Light w eight 16-nozzle head …

100%1 / 572
NPM-W2 EJM7DE-MB-02M-00
2-1-6-7
Periodic inspection points
by unit 4
<Placement head> (Option)
Maintenance
2-1-6
Over-
view
Nozzle head
Nozzle changer
Front and rear sides
NPM-W2 EJM7DE-MB-02M-00
2-1-6-8
Nozzle reflector
Nozzle reflector
contact surface
Nozzle flange upper
surface (2D code area)
Nozzle taper surface
Nozzle tip
Light weight 16-nozzle head
Light weight 16-nozzle head
Nozzle
Inner and outer
circumferences
Spring for nozzle
cushion
Clamp claw
Nozzle holder
Nozzle changer
Vacuum air path
* This is shared with the 12-nozzle head.
Spring for holding
clamp claws
θ-axis belt
Nozzle holder slicing
surface
Splicing shaft
sliding surface
Nozzle inside
Overview
NPM-W2 EJM7DE-MB-02M-00
2-1-6-9
12-nozzle head
* This is shared with the Light weight 16-
nozzle head.
Nozzle flange upper
surface (2D code
area)
Nozzle taper surface
Nozzle tip
Inner and outer
circumferences
Spring for nozzle
cushion
Clamp claw
Spring for holding
Clamp claws
Nozzle reflector
contact surface
Vacuum air path
Nozzle reflector
θ-axis belt
Nozzle holder slicing
surface
Splicing shaft
sliding surface
Nozzle inside
Periodic inspection points
by unit 5
<Placement head> (Option)
Maintenance
2-1-6
Over-
view
Nozzle holder
Nozzle changer
12-nozzle head Nozzle