N7201A617E00_0317 - 第109页
NPM-W 2 EJM7DE-MB-02M-00 2-1-6 -12 P eriodic inspection points by unit 7 <2D-inspection head> (Option) Maintenance 2-1-6 Over- view Calibration plate surface filter 2D-inspection calibration jig Inspection BOX Over…
NPM-W2 EJM7DE-MB-02M-00
2-1-6-11
3-nozzle head
Clamp claw
Spring for holding clamp
claws
Taper surface
Nozzle reflector
contact surface
Vacuum air path
θ-axis belt
Nozzle reflector
Nozzle flange
upper surface
(2D code area)
Nozzle tip
Periodic inspection points
by unit 6
<Placement head> (Option)
Maintenance
2-1-6
Over-
view
■Nozzle holder
■Nozzle changer
■3-nozzle head ■Nozzle
NPM-W2 EJM7DE-MB-02M-00
2-1-6-12
Periodic inspection points
by unit 7
<2D-inspection head> (Option)
Maintenance
2-1-6
Over-
view
Calibration plate surface
filter
2D-inspection calibration jig
Inspection BOX
Overview
NPM-W2 EJM7DE-MB-02M-00
2-1-6-13
This is a sectional view for explanation.
O-ring
Screw
Collar
Stopper pin
Spring
Holder inside
O-ring
Nozzle tip
Periodic inspection points
by unit 8
<Dispensing head> (Option)
Maintenance
2-1-6
Over-
view
Dispensing head
Screw unit
Ball screw
Linear guide
Heater/Thermocouple
Joint
Spring
O-ring
O-ring