N7201A653E - 第177页
EJM1EJ-MB-06 M-02 NPM-TT2 Remove the filter from the cover and clean it ● Use an air blow gun. ● Do not use an orga nic solvent. Filter Attach the filter to the cover T ake out the filter element to clean ① Disassemble t…

EJM1EJ-MB-06M-02NPM-TT2
Describes how to clean the vacuum pump filter.
Tool used: Phillips screwdriver (No.2) Time required: 30 minutes
●Be careful not to hit your head during the maintenance work.
6
Cleaning the vacuum
pump filter
Attach the cover
6-7-1
7
Maintenance
6-7
8
Unlock the
machine and
ON
Detach the tray
feeder or the
feeder cart
on the rear side
Attach the tray
feeder or the
feeder cart
on the rear side
●For a tray feeder
(→ P.14-8)
●For a feeder cart
(→ P.3-2)
●For a tray feeder
(→ P.14-8)
●For a feeder cart
(→ P.3-2)
1
Detach the cover
Cover
2
●Eight screws
Cover
Rear side
●Eight screws

EJM1EJ-MB-06M-02NPM-TT2
Remove the filter
from the cover
and clean it
●Use an air blow gun.
●Do not use an organic
solvent.
Filter
Attach the filter
to the cover
Take out the filter element to clean
①Disassemble the filter unit.
②Eliminate dirt on the filter
element with an air blow
gun.
(No organic solvent should
be used)
③Put the filter unit back
together.
5
Head
Filter element
O-ring
Filter case
Ring
6-7-2
3
4
Every
560
hours
PeriodicPeriodicPeriodicPeriodic
inspection
Vacuum pump

EJM1EJ-MB-06M-02NPM-TT2
Describes how to check the emergency stop switch.
Tool used: None Time required: 2 minutes
●Origin return should be performed in advance.
Inspecting the safety
switches 1
6-8-1
Maintenance
6-8
Checking the emergency stop switch
1
Press the emergency stop switch
on the front side
3
Press the emergency stop switch
on the rear side and make sure
the screen changes to the one
shown on the left as in the case
of the front side
2
Make sure the screen changes to the one
shown on the left.
Make sure the screen changes to the one
shown on the left.
2
+