WaferTransportSolutionManual - 第74页
PRECIS ION WAFE R PALLET REPLACEMENT PROCEDURES 2.16 Wafer Transport Solutio n Chapter Issue 1 Aug 11 Figure 2-8 300mm W afer Pallet Connector Chart 2 Stacked Elbows 201 141 Y Union 169265 with 2 Reducers 189520 Delta Un…
PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
Chapter Issue 1 Aug 11 Wafer Transport Solution 2.15
300mm Wafer Pallet The vacuum tubes are set up identically for 200mm and 300mm pallets.
1. Place the pallet with the top face down, on a protective cloth.
2. The three vacuum connections from the pallet transfer station are available
in its drag chain. On the pallet, they connect to the two stacked elbow
connectors (pin and wafer) and the single elbow connector (shim).
3. Fit the connectors and vacuum tubing as shown in the following diagrams:
PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
2.16 Wafer Transport Solution Chapter Issue 1 Aug 11
Figure 2-8 300mm Wafer Pallet
Connector Chart
2 Stacked Elbows 201141
Y Union 169265 with 2
Reducers 189520
Delta Union 201137
Elbow 201138
Elbow 201138
Branch T 201139
Branch T 201139
Push Fit Joint 201143
T Connector 201140
Branch T 201139
T Connector 201140
Elbow 201138
Branch T 201139
Elbow 201138
Elbow 201138
Branch T 201139
Union Y 169265
Delta Union 201137
Reducer 189520
Push Fit Joint 201143
T Connector 201140
Union Elbow 201141
PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
Chapter Issue 1 Aug 11 Wafer Transport Solution 2.17
Figure 2-9 300mm Wafer Pallet Vacuum Tubing
Shim Vacuum
Shim Vacuum
Lift Pin Vacuum
Switched Vacuum
Supply (Pin)
Switched Vacuum
Supply (Wafer)
Vacuum
Supply (Shim)