WaferTransportSolutionManual - 第15页
HEAVY PALLET RAILS MECHANICAL DETAIL Chapter Issue 1 August 11 Wafer Transport Solutio n 1.7 With the transport beams raised, the transport belts provide, nominally , 1mm of clearance between the bottom edge of th e pall…
HEAVY PALLET RAILS
MECHANICAL DETAIL
1.6 Wafer Transport Solution Chapter Issue 1 August 11
Transport Mechanism
Pallet Feed The Transfer Drive Motor drives the transfer belt via a 10:1 ratio gearbox which,
drives the transport belt shaft. This directly coupled arrangement, drives the
transport belts on the front and the rear rails synchronously.
A rail end sensor detects when the pallet is approaching the end of the rail,
should this occur motor control ceases and the pallet is stopped. Safety stops
are positioned on the rails at the opposite end to the pallet input. They are fitted
to each rail to physically prevent the pallet from running off the rail ends should
the user inadvertently change the transport rail direction.
Two transport beam lift cylinders are fitted to both sides of the front and rear
rails. They work together to drop the transport beams allowing the pallet to rest
on the pallet support blocks. At the end of the print operation the lift cylinders
lift, the belts are free to drive the pallet out of the printer to the downline
equipment.
Transport Belt
Right Side
Table Clamp
Data/Electrical
Connectors Housing
View on Rear of Front Transport Rail
Transport Belt
Drive Shaft
Transport Drive
Motor
Drive
Transfer Belt
Belt
Tensioner
Rail End
Sensor
Safety
Stop
Transport Drive
Gear Housing
Transport Beam
Lift Cylinder
View on Front of Rear Transport Rail
Transport Belt
Transport Belt
Drive Shaft
Transport Beam
Lift Cylinder
Safety
Stop
Rear Transport
Drive Belt Pulley
Transport Beam
Pallet Support Blocks
Sphere Dump Tray
HEAVY PALLET RAILS
MECHANICAL DETAIL
Chapter Issue 1 August 11 Wafer Transport Solution 1.7
With the transport beams raised, the transport belts provide, nominally, 1mm of
clearance between the bottom edge of the pallet overhang and the pallet
support blocks. This clearance provides the pallet with an uninterrupted
passage as it moves along the length of the transport rails.
Pallet Transport
Pulley
Pallet Transport Belt
Below Transport Height
View on Rear of Front Transport Rail with Transport Beam Lowered
Pallet Transport
Belt
Pallet Transport Height
7mm
Pallet Transport
Pulley
Pallet Transport Belt
at Transport Height
Pallet Transport
Belt
~1mm above
~
View on Rear of Front Transport Rail with Transport Beam Raised
HEAVY PALLET RAILS
MECHANICAL DETAIL
1.8 Wafer Transport Solution Chapter Issue 1 August 11
Figure 1-4 Raised Transport Beam Pallet Clearance
Accomodating
Pallets of Different
Sizes
The rear transport rail assembly can be adjusted toward the front or rear of the
machine to accommodate pallets of different dimensions. As the front and rear
rail assemblies are permanently linked by the transport belt drive shaft the
transport belts always move simultaneously. For rail width adjustment see the
Adjustments and Settings section of this manual.
View on Left End of Front Transport Rail with Transport Beam Raised
Pallet
Pallet Overhang
Transport Belt
Transport
Pulley
Snugger Rail
Pallet Support
Block
1mm Gap Between Pallet
and Pallet Support Block
Pallet