WaferTransportSolutionManual - 第19页

HEAVY PALLET RAILS MECHANICAL DETAIL Chapter Issue 1 August 11 Wafer Transport Solutio n 1.11 Snugger Rail Snugger plates are fitted to the f ront and rear rails; the rear snugger provides the palle t holding action. Wit…

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HEAVY PALLET RAILS
MECHANICAL DETAIL
1.10 Wafer Transport Solution Chapter Issue 1 August 11
stopping repeatability of the pallet.
The pallet continues to enter the machine until detected by the board at stop
sensor for a second time. The pallet stops, it is now directly below the screen
image.
Pallet
View on Side of Camera Advancing to Final Position (Front Rail Not Shown)
62mm 72mmto
Pallet Advances at
Reduced Rate
Camera/Sensor
Quickly Advance
Pallet
View on Front of Pallet at Final Position (Front Rail Not Shown)
Half Pallet Length
HEAVY PALLET RAILS
MECHANICAL DETAIL
Chapter Issue 1 August 11 Wafer Transport Solution 1.11
Snugger Rail Snugger plates are fitted to the front and rear rails; the rear snugger provides
the pallet holding action.
With the pallet in position, the transport beam drops allowing the pallet overhang
edge to rest on the pallet support blocks. For extra support, and to prevent the
pallet from moving out of position, a pneumatic snugger mechanism on the rear
rail assembly, actuates, pushing the rear rail snugger plate toward the front rail.
Figure 1-5 Rear Rail Snugger Operation
Rear Rail Front Rail
Pneumatic Snugger Mechanism
(Rail removed for clarity)
Snugger
View on Left End of Rear Transport Rail
Snugger Off, Pallet Free
Snugger On, Securing Pallet
Snugger Plate
Top Plate
Pallet Overhang Edge
Pallet
Beam
Support Block
HEAVY PALLET RAILS
MECHANICAL DETAIL
1.12 Wafer Transport Solution Chapter Issue 1 August 11
Pneumatic Snugger
Mechanism
The rear rail has two pneumatically operated bellows assemblies, located
between the beam lift cylinders and the rail legs, on both ends of the rail.
The bellows provide the motive force to push the rear snugger plate, which
clamps the pallet to the front snugger plate. A rail width collar locks the fixed
plate whilst the other side of the belows is free to move the snugger plate.
Rail Width Collar
Lower BellowsFixed Plate
Bellows Mounting Plate
Upper Bellows
Leg
Beam Lift Cylinder
View on Left Hand End of the Rear Rail