WaferTransportSolutionManual - 第21页
HEAVY PALLET RAILS MECHANICAL DETAIL Chapter Issue 1 August 11 Wafer Transport Solutio n 1.13 The pneumatically operated bellows act against a p air of fixed plates (only the l.h.s shown in the diagram). The bellows are …
HEAVY PALLET RAILS
MECHANICAL DETAIL
1.12 Wafer Transport Solution Chapter Issue 1 August 11
Pneumatic Snugger
Mechanism
The rear rail has two pneumatically operated bellows assemblies, located
between the beam lift cylinders and the rail legs, on both ends of the rail.
The bellows provide the motive force to push the rear snugger plate, which
clamps the pallet to the front snugger plate. A rail width collar locks the fixed
plate whilst the other side of the belows is free to move the snugger plate.
Rail Width Collar
Lower BellowsFixed Plate
Bellows Mounting Plate
Upper Bellows
Leg
Beam Lift Cylinder
View on Left Hand End of the Rear Rail
HEAVY PALLET RAILS
MECHANICAL DETAIL
Chapter Issue 1 August 11 Wafer Transport Solution 1.13
The pneumatically operated bellows act against a pair of fixed plates (only the
l.h.s shown in the diagram). The bellows are secured to the moveable bellows
mounting plates which are in-turn mounted to the snugger via a leg leaf spring
and a horizontal tie.
In operation, the left hand and the right hand bellows sets work together. They
move the snugger toward the front of the printer, clamping the pallet. The
system air pressure is applied causing all four bellows to expand, pushing the
snugger forward.
At the end of the print operation the pallet is released. Air pressure in each of
the bellows is exhausted, allowing the return spring assemblies to return the
moving plate back to the start location. The return spring assemblies are held
in place by a shoulder bolt which screws into the fixed plate.
Fixed Plate
Upper Bellows
Snugger
Lower Bellows
Bellows Mounting Plate
Leg Leaf Spring
Shoulder Bolt (2)
Return Spring (2)
Partially Exploded View (l.h.s. bellows) of the Snugger Mechanism
Horizontal Tie
HEAVY PALLET RAILS
MECHANICAL DETAIL
1.14 Wafer Transport Solution Chapter Issue 1 August 11
Leg Assemblies The four leg assemblies, each have a leaf spring, which is attached to the rising
table linear bearing clamps at the bottom end, and to the rail clamps at the top
end. On its own, the construction is flexible, however the rail beam is braced,
on the left hand side only, by an horizontal tie strap which locks it to the support
block.
The top of the beam lift cylinder attaches to the transport beam, the lift cylinder
pin pushes against the lift cylinder arm, creating the required lift. The beam
rises on the beam lift bearing during pallet transportation and retracts to position
the pallet for printing.
Lift Cylinder Arm
Beam Lift Cylinder
Rail Clamp
Rising Table Linear Bearing Clamp Tie Strap Support Block
View on Left Hand End of the Front Rail
Leg Leaf Spring
Beam Lift Bearing
Y Adjuster Block