WaferTransportSolutionManual - 第38页

HEAVY PALLET RAILS ADJUSTMENTS & SETTINGS 1.30 Wafer Transport Solutio n Chapter Issue 1 August 11 NOTE All setting bars are marked with unique readings expressing the bar ’s flatness. The centre reading is always ze…

HEAVY PALLET RAILS

ADJUSTMENTS & SETTINGS

Chapter Issue 1 August 11 Wafer Transport Solution 1.29

keep the clamp fixings in contact with the beam ends.

15. Place a tooling pin in the centre of the tooling table.

16. Align setting bar (201121) in the chase, with its centre hole over the tooling

pin.

17. Insert the depth micrometer into the centre hole of the setting bar touching

the tooling pin top.

18. Note the reading of the depth micrometer to the tooling pin.

Locking Screws

View on Left Hand End of the Rear Rail

Setting Bar

Depth Micrometer

Tooling Pin

HEAVY PALLET RAILS

ADJUSTMENTS & SETTINGS

1.30 Wafer Transport Solution Chapter Issue 1 August 11

NOTE

All setting bars are marked with unique readings expressing the bar’s

flatness. The centre reading is always zero, the other readings are relative

to the centre. These markings are known as the setting bar flatness

calibration figures.

19. Remove the depth micrometer.

20. Move the setting bar forward in the chase, so that it is over the front beam

pallet support blocks.

21. Insert the depth micrometer into the left hole of the setting bar. The depth

Setting Bar Flatness Calibration Figures

Centre is Zero (0.00)

HEAVY PALLET RAILS

ADJUSTMENTS & SETTINGS

Chapter Issue 1 August 11 Wafer Transport Solution 1.31

micrometer tip contacts the left hand pallet support block.

View on Front Left Quarter of the Front Rail

View on the Rear of the Front Rail

Depth Micrometer

(Location 2)

Rail Height Adjuster

Setting Bar

Micrometer readings taken

from the top surface of the

pallet support blocks as shown