WaferTransportSolutionManual - 第39页

HEAVY PALLET RAILS ADJUST MENTS & SE TTINGS Chapter Issue 1 August 11 Wafer Transport Solutio n 1.31 micrometer tip contact s the left ha nd pallet su pport block. View on Front Left Quarter of the Front Rail View on…

HEAVY PALLET RAILS

ADJUSTMENTS & SETTINGS

1.30 Wafer Transport Solution Chapter Issue 1 August 11

NOTE

All setting bars are marked with unique readings expressing the bar’s

flatness. The centre reading is always zero, the other readings are relative

to the centre. These markings are known as the setting bar flatness

calibration figures.

19. Remove the depth micrometer.

20. Move the setting bar forward in the chase, so that it is over the front beam

pallet support blocks.

21. Insert the depth micrometer into the left hole of the setting bar. The depth

Setting Bar Flatness Calibration Figures

Centre is Zero (0.00)

HEAVY PALLET RAILS

ADJUSTMENTS & SETTINGS

Chapter Issue 1 August 11 Wafer Transport Solution 1.31

micrometer tip contacts the left hand pallet support block.

View on Front Left Quarter of the Front Rail

View on the Rear of the Front Rail

Depth Micrometer

(Location 2)

Rail Height Adjuster

Setting Bar

Micrometer readings taken

from the top surface of the

pallet support blocks as shown

HEAVY PALLET RAILS

ADJUSTMENTS & SETTINGS

1.32 Wafer Transport Solution Chapter Issue 1 August 11

22. Slacken off the rail height adjuster lock screws on both sides of the rail.

23. Adjust the set screws to raise or lower the rail, until the reading on the depth

micrometer is the same as that of the reading made with the depth microm-

eter on the tooling pin, ± the setting bar calibration figure. The difference

should be within ± 0.01mm.

24. Repeat the steps above (17 through 23) with the depth micrometer on the

right hand side.

25. Tighten all lock screws and confirm the setting.

26. Carry out the procedure for the rear rail.

27. Restore the E Stop.

28. Close the front printhead cover.

29. Press the System Button.

30. Select Exit.

31. Select Rail System.

32. Select Select Module.

33. Select Toggle Heavy Rail Drop. This holds the pallet in the correct location

without clamping and lowers the belts.

34. Open the printhead front cover.

35. Place the setting bar across the top of both rails front to back.

36. Using the depth micrometer through the setting bar, as previously described,

check all four corners of the pallet. The reading on the depth micrometer is

the same as that of the reading made with the depth micrometer on the

tooling pin, ± the setting bar calibration figure. The difference should be

within ± 0.01mm.

37. If required, adjust the rail height, and recheck the settings.

38. Remove all tooling.

39. Remove the two setting rods.

40. Close the front printhead cover.

41. Press the System button.

42. Select Exit.

View on Left Front Rail Clamp

Set Screw

Rail Clamp

Linear Bearing

Height Adjuster

Lock Screw