WaferTransportSolutionManual - 第46页
HEAVY PALLET RAILS ADJUSTMENTS & SETTINGS 1.38 Wafer Transport Solutio n Chapter Issue 1 August 11 the readings change in accordance with ma nufactured tolerances indicated on the setting bar . Setting bars h ave a s…
HEAVY PALLET RAILS
ADJUSTMENTS & SETTINGS
Chapter Issue 1 August 11 Wafer Transport Solution 1.37
surface.
24. On completion, the locking screws can be tightened to lock the position.
25. Use the setting bar and feeler gauge to recheck flatness and adjust if
required.
26. Replace the sphere dump tray into the rear transport rail.
27. Wind down the two safety screws which support the rear of the rear top
plate. They should just contact the lift cylinder arms.
28. Close the printhead cover.
29. Replace safety covers.
30. If after printing, using these settings, the results are accurate; there is no
need to carry out the accuracy check.
Accuracy Check
WARNING
HEAVY OBJECT. EXTREME CAUTION SHOULD BE EXERCISED WHEN
MANUALLY HANDLING HEAVY ITEMS INTO OR OUT OF THE MACHINE.
NOTE
The precision pallet, shim, rail top plates and setting bar are all manufactured
to a high degree of flatness and are susceptible to surface flaws that can
degrade their function. In the following procedure hard tooling is used in contact
with these surfaces which may cause markings or more significant damage, if
not handled carefully. Tooling used must be clean and blemish free. All effort
must be made to avoid dragging, dropping or knocking tools on the exposed
surfaces.
The intended maximum flatness of the top plate relative to the shim is 50
microns(±0.025mm). The step from the shim to the top plate is +/- 0.01mm.
1. Ensure that the reference check has been carried out before proceeding.
2. Ensure that the DTI gauge is within its calibration date and the contact
surface of the gauge is clean and free of imperfections.
3. Remove the printer’s side safety covers and ensure reasonable access to
the area behind the rear rail.
4. Assemble the gauge on its stand so the probe is acting vertically downward
and the arm is extended to approximately 60 to 70mm from the edge of the
stand.
5. Place the gauge assembly onto the engraved calibration surface of the
setting bar.
6. Adjust the gauge probe so that it floats freely on the surface of the setting
bar top surface.
7. Zero the gauge.
NOTE
The above action calibrates the gauge needle-to-base zero position.
8. Carefully move the gauge assembly around the setting bar to confirm that
HEAVY PALLET RAILS
ADJUSTMENTS & SETTINGS
1.38 Wafer Transport Solution Chapter Issue 1 August 11
the readings change in accordance with manufactured tolerances indicated
on the setting bar. Setting bars have a surface flatness, on the engraved
side, of 20 microns.
9. Open the printhead front cover.
10. In the printer, ensure that all tooling has been removed from the tooling table
top.
11. Assemble the shim into the pallet and manually load both into the machine.
Slide it into the print position.
12. Close the printhead cover.
13. Press the System button.
14. Navigate to the Rail System module in Diagnostics.
15. Select Toggle Board Clamps. This holds the pallet in the correct location
and clamps it.
16. Press the E Stop.
17. Open the printhead front cover.
18. Loosen the two safety screws on the rear top plate to allow adjustment
without interference.
NOTE
The safety screws should remain either flush with or below the top surface
of the rear top plate.
19. Place a sheet of paper on the pallet and shim to offer surface protection.
20. Sit the gauge assembly on the sheet of paper.
21. Carefully and slowly slide the gauge across the sheet of paper so that the
probe can float across the top surface of the front top plate. Reposition the
gauge and paper to carefully describe lines across the top plates at the
±0.025mm tolerance positions. Observe the reading for deviations from the
desired tolerance and note their magnitudes and locations. Repeat the
0.025mm
0.025mm
+
-
+
-
+
-
+
-
0.01mm
Step tolerance -
shim to top plate
0.01mm
Step tolerance -
shim to top plate
DTI and Stand
Tolerances
Safety Screws
Pallet and Shim
Top Plates
A3
Sheet
HEAVY PALLET RAILS
ADJUSTMENTS & SETTINGS
Chapter Issue 1 August 11 Wafer Transport Solution 1.39
procedure for the rear top plate.
22. Place the gauge probe on the shim; the reading should be zero. Repeat the
step above along the 0.01mm line.
23. Make small adjustments, as required, to the front and rear top plate adjust-
ment screws, (do not unlock the associated locking screws) in the areas
which display out of tolerance results; only minor adjustments are neces-
sary.
24. Wind the safety screws back down; use an 0.05mm feeler gauge to maintain
Adjustment (1) Screws (2)and Locking
Sphere Dump Tray
Rear Top Plate
Front Top Plate
Locking Screw
Locking Screw
Adjustment (1) and Locking Screws (2)
Adjustment (1) Screw
Adjustment (1) Screw
Safety Screws (2)
Adjustment (1)
Locking
and
Screws (2)
Adjustment Screw