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PRECIS ION WAFE R PALLET REPLACEMENT PROCEDURES 2.8 Wafer Transport Solution Chapter Issue 1 Aug 11 Pneumatic Fittings For Use On Different Pallet Sizes The pallet handles 100mm , 150mm, 200mm and 300mm diameter wafers. …

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PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
Chapter Issue 1 Aug 11 Wafer Transport Solution 2.7
9. Unscrew the vacuum connector, using a flat bladed screwdriver, from the
pin.
10. Fit the vacuum connector to a new lift pin assembly.
11. Connect the vacuum tubing on the lift pin vacuum connector.
12. Fit the pin assembly into the clamp and tighten it up, sufficiently enough to
grip the pin loosely.
13. Turn the pallet over so that it sits on the base of the lift mechanism housing.
14. Fit a heavy pallet or block on top of the pallet so that the lift pin hole is
covered.
15. Lift the lift pin until it pushes against the shim (or block).
16. Tighten the clamp sufficiently enough to grip the pin without movement. Do
not overtighten the clamp as this may damage the pin wall.
17. Remove the shim or block.
18. Place the pallet face down on the conveyor rails. Re-attach the two
pneumatic input lines.
19. Turn the pallet over and sit it in the correct orientation, on the conveyor, for
left to right or right to left feed.
20. Close the transfer station’s front cover.
21. Switch on the pneumatic air input to the downline system.
22. Run the product with a wafer to check that the wafer is loaded and secure.
PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
2.8 Wafer Transport Solution Chapter Issue 1 Aug 11
Pneumatic Fittings
For Use On
Different Pallet
Sizes
The pallet handles 100mm, 150mm, 200mm and 300mm diameter wafers.
The tubing under each pallet is configured to match.
Figure 2-3 Pallet Top-Face-Up Showing Wafer Diameters
100mm
Lift Pins
150mm
200mm
300mm
PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
Chapter Issue 1 Aug 11 Wafer Transport Solution 2.9
100mm & 150mm
Wafer Pallets
1. Place the pallet with the top face down, on a protective cloth.
2. The three vacuum connections from the pallet transfer station are available
in its drag chain. On the pallet, they connect to the two stacked elbow
connectors (pin and wafer) and the single elbow connector (shim).
3. Fit the connectors and vacuum tubing as shown in the following diagrams: