WaferTransportSolutionManual - 第67页
PRECISION WAFER PALLET REPLACEMENT PROCEDURES Chapter Issue 1 Aug 11 Wafer Transport Solutio n 2.9 100mm & 150mm W afer Pallets 1. Place the pallet with the top face down, on a protect ive cloth. 2. The three vacuum …
PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
2.8 Wafer Transport Solution Chapter Issue 1 Aug 11
Pneumatic Fittings
For Use On
Different Pallet
Sizes
The pallet handles 100mm, 150mm, 200mm and 300mm diameter wafers.
The tubing under each pallet is configured to match.
Figure 2-3 Pallet Top-Face-Up Showing Wafer Diameters
100mm
Lift Pins
150mm
200mm
300mm
PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
Chapter Issue 1 Aug 11 Wafer Transport Solution 2.9
100mm & 150mm
Wafer Pallets
1. Place the pallet with the top face down, on a protective cloth.
2. The three vacuum connections from the pallet transfer station are available
in its drag chain. On the pallet, they connect to the two stacked elbow
connectors (pin and wafer) and the single elbow connector (shim).
3. Fit the connectors and vacuum tubing as shown in the following diagrams:
PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
2.10 Wafer Transport Solution Chapter Issue 1 Aug 11
Figure 2-4 100mm & 150mm Wafer Pallet
Connector Chart
Elbow 201138
2 Stacked Elbows 201141
Y Union 169265 with 2
Reducers 189520
Delta Union 201137
Elbow 201138
Elbow 201138
Branch T 201139
Branch T 201139
Branch T 201139
Push Fit Joint 201143
T Connector 201140
Branch T 201139
T Connector 201140
Elbow 201138
Elbow 201138
Branch T 201139
Union Y 169265
Delta Union 201137
Reducer 189520
Push Fit Joint 201143
T Connector 201140
Union Elbow 201141