WaferTransportSolutionManual - 第69页
PRECISION WAFER PALLET REPLACEMENT PROCEDURES Chapter Issue 1 Aug 11 Wafer Transport Solutio n 2.11 Figure 2-5 100mm & 150mm Wafer Pallet V acuum T ubing Switched V acuum Supply (Pin) Switched V acuum Supply (W afer)…
PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
2.10 Wafer Transport Solution Chapter Issue 1 Aug 11
Figure 2-4 100mm & 150mm Wafer Pallet
Connector Chart
Elbow 201138
2 Stacked Elbows 201141
Y Union 169265 with 2
Reducers 189520
Delta Union 201137
Elbow 201138
Elbow 201138
Branch T 201139
Branch T 201139
Branch T 201139
Push Fit Joint 201143
T Connector 201140
Branch T 201139
T Connector 201140
Elbow 201138
Elbow 201138
Branch T 201139
Union Y 169265
Delta Union 201137
Reducer 189520
Push Fit Joint 201143
T Connector 201140
Union Elbow 201141
PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
Chapter Issue 1 Aug 11 Wafer Transport Solution 2.11
Figure 2-5 100mm & 150mm Wafer Pallet Vacuum Tubing
Switched Vacuum
Supply (Pin)
Switched Vacuum
Supply (Wafer)
Shim Vacuum
Shim Vacuum
Vacuum
Supply(Shim)
Lift Pin Vacuum
PRECISION WAFER PALLET
REPLACEMENT PROCEDURES
2.12 Wafer Transport Solution Chapter Issue 1 Aug 11
200mm Wafer Pallet 1. Place the pallet with the top face down, on a protective cloth.
2. The three vacuum connections from the pallet transfer station are available
in its drag chain. On the pallet, they connect to the two stacked elbow
connectors (pin and wafer) and the single elbow connector (shim).
3. Fit the connectors and vacuum tubing as shown in the following diagrams: