WaferTransportSolutionManual - 第78页
INSTALLATION OVERVIEW 3.2 Wafer Transport Solution Chapter Issue 1 Aug 11 NOTE 1. DEK Printer installation instructions are det ailed in the printer ’s specific Installation manual. Follo w the procedures laid out in the…
INSTALLATION
OVERVIEW
Chapter Issue 1 Aug 11 Wafer Transport Solution 3.1
CHAPTER 3 INSTALLATION
OVERVIEW
This chapter describes the various steps needed to set up the printer and run
the product, it gives specific instruction for the Wafer Transport Solution (WTS)
module. The module consists of the precision wafer pallet and printer(s) fitted
with heavy pallet transport rails as detailed in Chapters 1 & 2 of this manual.
In addition, it describes the mechanical detail required to interface the printer
with an upline wafer transfer station. Currently, DEK recommends either the
CHAD Industries fully automatic system or the NUTEK semi-automatic
system.
Figure 3-1 DEK Printer and CHAD Transfer Station Configuration
INSTALLATION
OVERVIEW
3.2 Wafer Transport Solution Chapter Issue 1 Aug 11
NOTE
1. DEK Printer installation instructions are detailed in the printer’s specific
Installation manual. Follow the procedures laid out in the installation manual
in conjunction with these application specific instructions.
2. The DEK Printer can interface with an upline pallet transfer station; currently
DEK recommend the use of equipment from either: CHAD Industries, a fully
automatic system, or NUTEK a semi-automatic system.
3. The heavy pallet transport rails are fixed directly to the printer’s rising table;
transport height is not determined by the position of the clatter bars, as
described for standard DEK printing machines.
4. A complete system may consist of:
a. A DEK printer used for printing flux
b. A pallet transfer station or a manual load area
c. A DEK printer used for depositing spheres
Figure 3-2 A Typical NUTEK Production Layout
Downline Upline
DEK
Machine
(Flux Print)
DEK
Machine
(Sphere Attach)
Upline
Transfer
Station
INSTALLATION
OVERVIEW
Chapter Issue 1 Aug 11 Wafer Transport Solution 3.3
Figure 3-3 A Typical CHAD Production Layout
CHAD WaferMate with DEK Printers and Oven Line
CHAD WaferMate
Oven
FOUP
(Wafer Stack)