WaferTransportSolutionManual - 第87页
INSTALLATION EQUIPMENT INSTALLATION Chapter Issue 1 Aug 11 Wafer Transport Solutio n 3.11 NUTEK Linking Conveyor Overview WARNING HEAVY OBJECT. EXTREME CAUTION SHOULD BE EXERCIS ED WHEN MANUALLY HANDLING HEAVY ITEMS INTO…
INSTALLATION
EQUIPMENT INSTALLATION
3.10 Wafer Transport Solution Chapter Issue 1 Aug 11
Figure 3-5 CHAD Handler Overview
WaferMate Layout
FOUPs
MMI
Transfer Station
Aligner
Four-axis Robotic Arm
Transfer Station
INSTALLATION
EQUIPMENT INSTALLATION
Chapter Issue 1 Aug 11 Wafer Transport Solution 3.11
NUTEK Linking Conveyor Overview
WARNING
HEAVY OBJECT. EXTREME CAUTION SHOULD BE EXERCISED WHEN
MANUALLY HANDLING HEAVY ITEMS INTO OR OUT OF THE MACHINE.
WARNING
MOVING PARTS. MOVING PARTS ARE PRESENT IN THE VICINITY OF THIS
WARNING LABEL, THESE PARTS HAVE THE POTENTIAL TO CAUSE INJURY.
Sequence The Nutek linking conveyor is a semi-automatic system. Pallets are manually
loaded into the module.
1. The operator opens the front cover to gain access to the module.
Rail Width Adjuster Rail Width AdjusterKey Switch
Mains Isolator
E Stop
Power
Lamp Vacuum Vacuum
Start Plate Reset ON OFF
INSTALLATION
EQUIPMENT INSTALLATION
3.12 Wafer Transport Solution Chapter Issue 1 Aug 11
2. The empty pallet is placed inside the conveyer so the user can connect the
pneumatic pipes to:
•Pin Vac
•Wafer Vac
•Shim Vac
The flying leads are in the drag chain.
3. The pallet is laid flat onto the transport rails and a shim is placed on the
pallet.
Pin Vac
Shim Vac Wafer Vac Drag Chain