WaferTransportSolutionManual - 第88页

INSTALLATION EQUIPMENT INSTALLATION 3.12 Wafer Transport Solutio n Chapter Issue 1 Aug 11 2. The empty pallet is placed inside the conveyer so the user can connect the pneumatic pipes to: •P i n V a c •W a f e r V a c •S…

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INSTALLATION
EQUIPMENT INSTALLATION
Chapter Issue 1 Aug 11 Wafer Transport Solution 3.11
NUTEK Linking Conveyor Overview
WARNING
HEAVY OBJECT. EXTREME CAUTION SHOULD BE EXERCISED WHEN
MANUALLY HANDLING HEAVY ITEMS INTO OR OUT OF THE MACHINE.
WARNING
MOVING PARTS. MOVING PARTS ARE PRESENT IN THE VICINITY OF THIS
WARNING LABEL, THESE PARTS HAVE THE POTENTIAL TO CAUSE INJURY.
Sequence The Nutek linking conveyor is a semi-automatic system. Pallets are manually
loaded into the module.
1. The operator opens the front cover to gain access to the module.
Rail Width Adjuster Rail Width AdjusterKey Switch
Mains Isolator
E Stop
Power
Lamp Vacuum Vacuum
Start Plate Reset ON OFF
INSTALLATION
EQUIPMENT INSTALLATION
3.12 Wafer Transport Solution Chapter Issue 1 Aug 11
2. The empty pallet is placed inside the conveyer so the user can connect the
pneumatic pipes to:
•Pin Vac
•Wafer Vac
•Shim Vac
The flying leads are in the drag chain.
3. The pallet is laid flat onto the transport rails and a shim is placed on the
pallet.
Pin Vac
Shim Vac Wafer Vac Drag Chain
INSTALLATION
EQUIPMENT INSTALLATION
Chapter Issue 1 Aug 11 Wafer Transport Solution 3.13
4. The pallet is positioned ensuring it covers both alignment sensors.
5. The keyswitch mode is as follows:
a. MODE1 is Left to Left conveyor operation
b. MODE 2 is Left to Left and Right to Right operation (feeding two printers)
c. Mode 3 is Right to Right conveyor operation
The operator selects the correct mode for the operation.
6. Switch the mains isolator ON. The green power lamp comes ON.
7. Press the green ON button. The vacuum pins raise.
8. Load the wafer onto the pins.
Rail End Sensor
Left Alignment Sensor Right Alignment Sensor
Rail Width Adjuster Rail Width AdjusterKey Switch
Mains Isolator
E Stop
Power
Lamp Vacuum Vacuum
Start Plate Reset ON OFF