SP60P-M Mechanical 20120628 - 第104页
12-A 基 板 上押えユ ニット(M) Bo ar d F lat ten ing U nit (M) パーツレイアウト Kit N o . キット品 番 Kit N am e キット名称 KXFX 039M A 00 ｾｸｼｮﾝNo. PARTS LAYOUT Section No. - - M85 ( KKXFX039MA00-05-1 )
Ref
No.
Remarks
R
1
Q'ty
11-E
マスククリーニングユニット(M)
Mask Cleaning Unit(M)
ｲﾗｽﾄ
No.
Part No.
品 名品番 数量
R
2
パーツリスト
Kit N
o
.
キット品
番
Kit Name
キット名称
KXFX039LA00
Part Name
備 考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
HOUSING
1
1 KXFB038CA00
MANIFOLD
1
2 N210002141AA
BRACKET
1
3 N210019803AA
BRACKET
1
4 KXFB024JA00
BRACKET
1
5 N210059540AA
BRACKET
1
6 KXFB00LRA00
PW004A0
2
7 KXFB01CCA00
PUMP
1
8 N510048045AA PB1013-01-X31
JOINT
2
9 KXF02BPAA00 KQL04-01S
TANK
1
10 N610010652AA
C-RING
1
12 KXF07ZFAA00 STW-32
TUBE
1
13 KXF0DWU4A00 PN-4-10X6.5 milk-white
FILTER
1
14 N510001105AA UY3/8(mesh40)
BUSH
1
15 KXF0DXZNA00 No.386 M-3/8X1/8 SUS
VALVE
1
16 KXF0E0KWA00 USG3-X0891(DDA)
SILENCER
1
17 N510064382AA AN10-01
NIPPLE
2
18 N510019610AA No.507 21X3/4 SUS
HOSE
1
19 KXF0DWU6A00 Duct EE-type D50
HOSE-BAND
2
20 KXF05QVAA00 ABA band 19-28
FILTER
1
21 N510024186AA
A
VFY036A
VALVE
2
22 N510056193AA ADK11-25X3483
NIPPLE
2
23 N510020198AA V6N-10
JOINT
1
24 N510020199AA VT-10
NIPPLE
2
25 N510020200AA VRN-1008
JOINT
3
26 KXF05HJAA00 KQH08-02S
PLUG
3
27 KXF02CSAA00 KQP-08
TUBE
1
28 KXF0DX38A00 Chemi-flex inner diameter D19
NIPPLE
1
29 KXF0DXJCA00 No.404 1 1/4X34
HOSE
1
30 N510005275AA TAC Eco Duct D32
BAND
2
31 KXF0DZHTA00 VE36
BAND
2
32 KXF0DWUAA00 VE54
JOINT
3
33 KXF0977AA00 CPS15M-8B
JOINT
3
34 KXF09Y3AA00 CPP15-8B
SENSOR
1
35 KXF078BAA00 GT7SN
PLATE
2
36 KXF05EMAA00 GP5-1
BUSH
1
37 N510020201AA (Bu)1X3/4
BUSH
1
38 N510020202AA VBU-1610
NIPPLE
1
39 N510020203AA VRN-1608
JOINT
1
40 N510020204AA (SL)3/4
FILTER
1
41 N510024187AA
A
VFY036A-E
SOCKET
3
42 KXF0DX37A01 (DA KXF0DX37A01)
BAND
3
43 N510019612AA AS-60
Process Pump Kit
1
44 N610113239AA
JOINT
1
45 KXF02BPAA00 KQL04-01S
JOINT
2
46 N510001107AA L4N6X4-PT1/8ST
M84
--
( KKXFX039LA00-16-5 )
12-A
基
板
上押えユニット(M)
Board Flattening Unit(M)
パーツレイアウト
Kit N
o
.
キット品
番
Kit Name
キット名称
KXFX039MA00
ｾｸｼｮﾝNo.
PARTS LAYOUT
Section No.
--
M85
( KKXFX039MA00-05-1 )
Ref
No.
Remarks
R
1
Q'ty
12-A
基板上押
え
ユニット
(
M
)
Board Flattening Unit(M)
ｲﾗｽﾄ
No.
Part No.
品 名品番 数量
R
2
パーツリスト
Kit No.
キット
品番
Kit Name
キット 名称
KXFX039MA00
Part Name
備 考
ｾｸｼｮﾝ
No
.
PARTS LIST
Section No.
R
3
BRACKET
1
1 N210044702AA
PLATE
1
2 N210065926AA
PLATE
1
3 KXFB07MQA00
GUIDE
1
4 KXFB0346A01
PLATE
2
5 KXFB0347A00
PLATE
1
6 KXFB0348A00
GUIDE
1
7 KXFB0349A01
RAIL
1
9 N610051796AA
SPEED-CONTROLLER
2
10 KXF0E4LEA00 AS2311F-01-04S
CYLINDER
1
11 KXF09WPAA00 CXSL25-10-Z73LS
NUT
5
15 N510017869AA
Hexagon nut Type-3 Best class M6-6H-4T A2J (Trivalent)
CAP
2
16 KXF0DWYMA00 ECP-1590-6
CATCH
1
17 KXF09WRAA00 C-1077-B
PLUNGER
1
18 KXF09WSAA00 BSZ6
BOLT
2
19 KXF0DWUGA00 CBSST6-16
M86
-
-
( KKXFX039MA00-05-1 )