MN-E00372EDW-XX_B(1) - 第161页

CS DWG NO. OF REV DESCRIPTION SHEET DESCRIPTION NO. PART NO. PART INFORMATION AND IS NOT TO BE USED OR DO NOT SCALE REPRODUCED WITH OUT PERMISSION OF THIS DRAWING CON TAINS PROPRIETARY ALL CAPACITORS ARE IN µ F ALL RESIS…

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CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
SD WAFER TABLE
01-E35501
CS-01-E35501
22
FROM: 01-E35501_C_2013.04.09
C1
C
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
02-79130
(WT) X HOME SENSOR
02-E17959
(WT) X ENCODER
02-E11283
(WL) WAFER EXITING FIBER AMP
02-79143
(WT) INNER RING UP/DN CHECK SNR
02-79145
(WT) TOP PLATE UP/DN LIMIT SNR
02-79144
(WT) ROTATING RING HOME SNR
02-E17960
(WT) Y HOME SENSOR
53-40163
HIGH SENSITIVITY SENSOR
02-E17963
(WT) Y ENCODER
02-79131
02-79131
(WT) FRONT SAFETY SNR
(WT) FRONT SAFETY SNR
02-79146
(WL) Y-HOME SENSOR
11-2
(WT) 8312SD WAFER TABLE
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WT) WAFER TABLE X-BASE
01-E10928
CS-01-E10928
11
FROM: 01-E10928_H_2013.04.09
H1
H
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 02-79130 (WT) X HOME SENSOR ASSY. 1
2 02-79131 (WT) FRONT SAFETY SNR ASSY. 1
3 07-L00716 LINEAR MOTOR ASSY 1
4 19-40205 RETAINING RING (EXTERNAL) STW-12 2
5 24-00036 LINEAR BEARING 6 X 12 X 19 2
6 24-00304 LM GUIDE LWES15C2R640SLT1P/W2YCG 1
7 26-E22128 (WT) STOPPER 2
8 26-F50459 (WT) X STOPPER BKT - A 2
9 26-F51673 (WT) BUMPER GUIDE ROD 2
10 26-F51677 (WT) BUMPER GUIDE ROD STOPPER 2
11 53-70023 RGS-S SCALE (SELF-ADHESIVE) 2
12 75-10064 COMPRESSION SPRING D21960 2
6
1
4
5
7
8
9
11
12
2
3
10
Assembly View
11-3
(WT) 8312SD WAFER TABLE
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WT) WAFER TABLE Y-BASE
01-E38490
CS-01-E38490
11
FROM: 01-E38490_B_2015.03.05
B1
B
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 01-60544 (WT) Y HARD STOPPER ASSY 2
2 02-E17960 (WT) Y HOME SENSOR ASSY 1
3 02-E17963 (WT) Y ENCODER ASSY. 1
4 07-L00718-01 330 STROKE LINEAR MOTOR (3X COIL) ASSY 1
5 26-F51510 (WT) LM GUIDE LWES15C2R760SLT1P/YCG 1
5
3
2
4
1
Assembly View
11-4
(WT) 8312SD WAFER TABLE