MN-E00372EDW-XX_B(1) - 第163页

CS DWG NO. OF REV DESCRIPTION SHEET DESCRIPTION NO. PART NO. PART INFORMATION AND IS NOT TO BE USED OR DO NOT SCALE REPRODUCED WITH OUT PERMISSION OF THIS DRAWING CON TAINS PROPRIETARY ALL CAPACITORS ARE IN µ F ALL RESIS…

100%1 / 268
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WT) WAFER TABLE Y-BASE
01-E38490
CS-01-E38490
11
FROM: 01-E38490_B_2015.03.05
B1
B
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 01-60544 (WT) Y HARD STOPPER ASSY 2
2 02-E17960 (WT) Y HOME SENSOR ASSY 1
3 02-E17963 (WT) Y ENCODER ASSY. 1
4 07-L00718-01 330 STROKE LINEAR MOTOR (3X COIL) ASSY 1
5 26-F51510 (WT) LM GUIDE LWES15C2R760SLT1P/YCG 1
5
3
2
4
1
Assembly View
11-4
(WT) 8312SD WAFER TABLE
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WT) WAFER EXPANDER
01-E38491
CS-01-E38491
11
FROM: 01-E38491_A_2015.03.07
A1
A
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 01-E04237 (WT83) RING LOCK SOL ASSY 1
2 01-E04238 (WL) LOADER CLAMP SOL ASSY 1
3 01-E11009 (WT) ROTATING RING V BEARING, FIX 2
4 01-E11010 (WT) ROTATING RING V BEARING, ADJ 5
5 01-E11105 (WT) TOP PLATE UP/DN SCREW (DRIVING) 1
6 01-E11106 (WT) TOP PLATE UP/DN SCREW (DRIVEN) 3
7 01-E11107 (WT) EXP IDLER 3
8 01-E11108 (WT) EXP, INNER IDLER 8
9 01-E11109 (WT) EXP TENSIONER IDLER 1
10 01-E11110 (WT) ROTATING RING & PULLEY ASSY 1
11 01-E11112 (WT) INNER RING ASSY 1
12 01-E11113 (WT) EXPANDER TOP PLATE ASSY 1
13 01-E11114 (WT) EXPANDER DRIVING ASSY 1
14 01-E11115 (WT) INNER RING UP/DN CHECK SNR ASSY 1
15 01-E11116 (WT) ROTATING RING ENCODER IDLER 1
16 01-E11117 (WT) EXPANDER ROTATION DRIVING ASSY 1
17 01-E11118 (WT) THETA RING TENSIONER ASSY 1
18 01-E11119 (WT) THETA, IDLER 1
19 01-E11120 (WT) THETA MOTOR, TENSIONER ASSY 1
20 01-E18195 (WT) RING LOCK ASSY 1
21 01-E19699 (WT) SOLENOID MNT 1
22 02-79141 (WT) WE THETA MOTOR 1
23 02-79144 (WT) ROTATING RING HOME SNR ASSY 1
24 02-E17959 (WT) X ENCODER ASSY. 1
25 02-E17962 (WT)ROTATING RING ENC ASSY 1
26 23-40042 DOWEL PIN D4 X L10, SST 2
27 26-F51633 (WT) X-STOPPER BKT - B 2
28 26-F51634 (WT) RUBBER PAD FOR X STOPPER 2
29 26K-E02057 (WT) WE-12,INNER RING 1
30 73-00386 TIMING BELT A6R23M090060 1
31 73-00409 TIMING BELT A6B16-090025 1
32 73-00630 TIMING BELT 1945-5M-15MM 1
Assembly View
29
30
31
1
2
4
5
6
8
9
10
11
12
13
14
15
16
20
24
25
32
B
DETAIL B
C
DETAIL C
19
17
D
DETAIL D
18
E
DETAIL E
26
A
DETAIL A
F
DETAIL F
G
DETAIL G
3
28
23
7
27
21
22
11-5
(WT) 8312SD WAFER TABLE
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WT) TOP PLATE UP/DN SCREW (DRIVING)
01-E11105
CS-01-E11105
11
FROM: 01-E11105_B_2015.03.07
B1
B
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 01-E15233 (WT) DRIVING SCREW 1
2 23-60015 PARALLEL KEY B2 X H2 X L15 1
3 24-09015 A/C BEARING 706ATYDFC7P5 1
4 26-E26585 (WT) END WASHER 1
5 26-E26888 (WT) LEADSCREW NUT LOCK PLATE 1
6 26-E89091 (WT) A/C BEARING COVER FOR LS 1
7 26-F34928 (WT) LOCKING NUT 2
8 26-F51580 (WT) MITER GEAR, DRIVEN 1
9 26-F51581 (WT) TIMING BELT PULLEY (HTD 5,16T,W16) 1
10 26-F51583 (WT) A/C BEARING SPACER 1
Assembly View
2
3
4
6
7
8
9
1
5
10
11-6
(WT) 8312SD WAFER TABLE