MN-E00372EDW-XX_B(1) - 第172页
CS DWG NO. OF REV DESCRIPTION SHEET DESCRIPTION NO. PART NO. PART INFORMATION AND IS NOT TO BE USED OR DO NOT SCALE REPRODUCED WITH OUT PERMISSION OF THIS DRAWING CON TAINS PROPRIETARY ALL CAPACITORS ARE IN µ F ALL RESIS…
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WL) LOADER Y ARM ASSY
01-E41543
CS-01-E41543
11
FROM: 01-E41543_B_2015.01.13
B1
B
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 26-F51682 (WL) BELT CLAMP 1
2 26-F61789 (WH83) TILTING SCREW 5
3 S26-G26563 (WL) CLAMP ARM TILTING SCREW 5
Assembly View
2
3
1
11-13
(WT) 8312SD WAFER TABLE
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WL) LOADER CLAMP (NON CONTACT SNR)
01-E41544
CS-01-E41544
11
FROM: 01-E41544_C_2015.03.07
C1
C
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 02-E11283 (WL) WAFER EXITING FIBER AMPLIFIER 1
2 20-70471 SOC SET CUP SCREW M3 X 5 2
3 23-40043 DOWEL PIN D3 X L10, SST 2
4 24-11020-1 FLANGE BEARING 2X5X2.3 F682ZZ 4
5 26-57459 (WH) MA, FIX CLAMP MEMBRANE 2
6 26-E24143 (WL) PIVOT SHAFT 2
7 26-E24145 (WL) PLUNGER 2
8 31-40469 BARB FITTING M-3AU-3 2
9 53-40163 HIGH SENSITIVITY SENSOR HPF-T007 1
10 875-20019 COMPRESSION SPRING D10720 2
Assembly View
3
5
6
7
4
9
1
10
8
2
11-14
(WT) 8312SD WAFER TABLE
Section 12
Part NoDescriptionRevPage
01-E17822(WBFC) WAFER BLOWERD12-1